Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used in adaptive optics for retinal obs ...
Electrical conduction property measurement of fracture-fabricated silicon nanogap
半導体微細加工技術を用いて作製した単結晶シリコンMEMSデバイスの梁構造に(111)面でへき開破壊を用いて数μm角の均一 ...
Assembly of single SWCNT modified by ssDNA using dielectrophoresis
To clarify the characteristic of SWCNT including its variabi ...
Ionic liquids electrospray thruster
We have developed Ionic liquids electrospray thruster (ILEST ...
SAW Devices for Reservoir Computing
We are developing SAW (Surface acoustic wave) devices which ...
Dynamic Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
The aim of this research is to analyze local and instantaneo ...
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricate ...
Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration gyros, it is ne ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is us ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...
(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction o ...
Physical Reservoir Computing Using Nonlinear Heat Conduction
As the demand for machine learning and data analysis increas ...