Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...
Electrochemical properties of MXene/CNT thin film
MXene, which is a two-dimensional layered nanomaterial, exhi ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Microfluidic device for separation of DNA origami complexes
Microfluidic device by using dielectrophoresis(DEP) is propo ...
Parallel tensile testing device with integrated shear strain gauge for SC-Si
In order to shorten testing time on tensile-mode fatigue tes ...
Temperature dependence of electron emission between cleavage planes for thermionic power generation
シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う
Mode Localization and Reservoir Computing of MEMS Resonator Array
Recently, physical reservoir computing (PRC) has attracted a ...
Dynamic Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
The aim of this research is to analyze local and instantaneo ...
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of retinal observation is warped by d ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...
Tensile Testing for Carbon Nanotube using Electrostatic MEMS
We are developing the method for tensile test of Carbon nano ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of ey ...