MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize ...
Reliability of Single-Crystal Silicon Micromirrors
The purpose of this research is to realize high fracture str ...
Microchannel integrated MEMS device
Siで構成されるMEMSアクチュエータと，構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い，常温での異 ...
Reliability evaluation of silicon microstructure
Silicon is a widely-used material for MEMS devices structure ...
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed fo ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of ey ...