Our group conducts research on nano/microscale machines, mainly fabricated using semiconductor fabrication technology, called as “Nano/Microsystem". In this size scale, specific phenomenon, such as electrostatic force, air dumping and quantum effect become dominant to express behaviors of machines. We need to have a new insights for understanding the operation of machines. We employs a novel fabrication, measurement, design and analysis technologies to create a new machine, which is going to be used in future societies.


Professor: Toshiyuki TSUCHIYA, Associate Professor: Jun HIROTANI, Junior Associate Professor: Amit Banerjee
Researcher 2, Secretary 1, PhD student 5, M2 student 4, M1 student 3, B4 student 6


  • Office, Laboratory
  • Cleanroom
  • Nanotechnology Hub, Kyoto University (at Yoshida Campus)


  • Thin film tensile testing machines (Original)
  • Micro Raman Spectroscopy (HORIBA, LabRAM HR-800)
  • Scanning Electron Microscope (JEOL JSM-6390)
  • Manual Prober (Oyama) with Laser Trimmer (Hoya)
  • Digital Lock-in Amplifier(Zurich Instruments, HF2-LI, MF-LI)
  • Impedance Analyzer (Keysight, 4294A)

Clean room

【Research topics】