NMS Lab
Our group conducts research on nano/microscale machines, mainly fabricated using semiconductor fabrication technology, called as “Nano/Microsystem". In this size scale, specific phenomenon, such as electrostatic force, air dumping and quantum effect become dominant to express behaviors of machines. We need to have a new insights for understanding the operation of machines. We employs a novel fabrication, measurement, design and analysis technologies to create a new machine, which is going to be used in future societies.
MEMBER
Professor: Toshiyuki TSUCHIYA, Associate Professor: Jun HIROTANI, Junior Associate Professor: Amit Banerjee
Researcher 2, Secretary 1, PhD student 5, M2 student 4, M1 student 3, B4 student 6
SITES
- Office, Laboratory
- Cleanroom
- Nanotechnology Hub, Kyoto University (at Yoshida Campus)
EQUIPMENT
- Thin film tensile testing machines (Original)
- Micro Raman Spectroscopy (HORIBA, LabRAM HR-800)
- Scanning Electron Microscope (JEOL JSM-6390)
- Manual Prober (Oyama) with Laser Trimmer (Hoya)
- Digital Lock-in Amplifier（Zurich Instruments, HF2-LI, MF-LI)
- Impedance Analyzer (Keysight, 4294A)
Clean room
- Moving mask aligner（Japan Science Engineering, MUM-0001）
- ICP-RIE（ULVAC，NE-730）
- Dicing machine（DISCO，DAD-322）
- EB deposition（Yashima, Custom made）
- Thermal deposition (ULVAC KIKO, VPC-260F）
- Wedge wire bonding tool（Ultrasonic engineering，SW-1-7K）
- Nanoimprint（Bondtech, NI-1000K）