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The a-C:H (Hydrogenated Amorphous Carbon) film is one of the promising coating material in MEMS indu ...

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せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計,作製し高い負荷周波数での引張疲労試験の実現を目指します.

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Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property ...