Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) film is one of the promising coating material in MEMS industry due to its m ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計，作製し高い負荷周波数での引張疲労試験の実現を目指します．
Tensile testing of silicon at high temperature
Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property is affected by t ...