Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope

A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) with non-uniform radial width and optimized suspending beams has been proposed in order to decrease frequency splits (∆f) caused by anisotropic in-plane Young’s modulus (E) of (100) SCS and realize mode-matching in VRG. The FEA simulation and experimental results demonstrated effective decrease of ∆f due after geometrical compensation.

[Applications] • Inertial measurement unit (IMU) • Ammunitions & rockets guidance 

  • Yunyi, Y. Hirai, and T. Tsuchiya. The 7th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2020), Hiroshima, Japan, 2020.