Conference Presentations
- 1. Nov. 21-22 The 2024 International Meeting for Future of Electron Devices, Kansai (IMFEDK 2024), Ryukoku Univ., Kyoto, Japan
- 2. Dec. 1-6, 2024 2024 MRS Fall Meeting & Exhibit (Boston, MA)
- 3. Jan 22-26, 2025 The 38th International Conference on Micro Electro Mechanical Systems (MEMS 2025) (Kaoshiung, Taiwan)
- 4. Jan 21-25 The 37th International Conference on Micro Electro Mechanical Systems (MEMS 2024) (Austin, Texas)
- 5. March 25-28 The 11th IEEE International Symposium on Inertial Sensors & Systems, INERTIAL 2024 (Hiroshima, JAPAN)
- 6. June 23-26 Asia-Pacific Conference of Transducers and Micro-Nano Technology 2024 (APCOT 2024)
- 7. Sept. 16-19 50th international conference on Micro and Nano Engineering (MNE2024) (Montpellier, France)
- 8. Sept. 22-26 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (Taipei, TAIWAN)
- 9. Sept. 25-26 2024 IEEE IRDS and International Nanodevices and Computing Conference (INC) (Online)
- 10. Nov. 10-14 The 34th International Symposium on Transport Phenomena (ISTP-34) (Taoyuan Convention and Exhibition Center, Taoyuan, Taiwan)
- 11. Nov. 12-15 37th International Microprocesses and Nanotechnology Conference (MNC 2024) (Kyoto Brighton Hotel, Kyoto, Japan)
- 12. Jan. 15-19, 2023 The 36th International Conference on Micro Electro Mechanical Systems (MEMS 2022) (Munich, Germany)
- 13. Feb. 3 2023 Symposium on User-Facility Network in Asia
- 14. March 28-31 The 10th IEEE International Symposium on Inertial Sensors & Systems, INERTIAL 2023 (Kaua’i, Hawaii, USA)
- 15. May 14-17 The 18th International Conference on Nano/Micro Engineered and Molecular Systems: IEEE-NEMS2023 (Jeju, Korea)
- 16. June 25-29 The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems: Transducers 2023 (Kyoto, Japan)
- 17. 9/18 Deep learning meets Neuromorphic Hardware (a Workshop of European Conference on Machine Learning and Principles and Practice of Knowledge Discovery in Databases) (Turin, Italy)
- 18. 9/25-28 49th international conference on Micro and Nano Engineering (MNE2023) (Berlin, Germany)
- 19. 11/14-17 36th International Microprocesses and Nanotechnology Conference (MNC 2023) (JR Hotel Clement, Tokushima)
- 20. Jan. 9-13, 2022 The 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022) (Tokyo, JAPAN, Hybrid)
- 21. Feb. 28-Mar. 4 The 33rd International Symposium on Space Technology and Science (ISTS 2022) (Oita, Online)
- 22. May 8-13 2022 MRS Spring Meeting (Honolulu, HI)
- 23. May 29-June 1 Asia-Pacific Conference of Transducers and Micro-Nano Technology 2022 (APCOT 2022)
- 24. June 29-30 International Conference and Exhibition on New Actuator Systems and Applications (Actuator 2022)
- 25. August 28-31 2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022) (Nagoya, Japan)
- 26. Nov. 8-11 35th International Microprocesses and Nanotechnology Conference (MNC 2022) (JR Hotel Clement, Tokushima)
- 27. Jan. 25-29 The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021) (Online)
- 28. June 20-25 The 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021) (Online)
- 29. Sept. 20-23 Micro and Nano Engineering Conference (Turin, Italy / Hybrid)
- 30. Oct. 26-29 34th International Microprocesses and Nanotechnology Conference (MNC 2021) (Online)
- 31. Sept. 27-30 Virtual IEEE NEMS 2020 (Online)
- 32. Oct. 4-9 μTAS2020 (Online)
- 33. Nov. 9-12 MNC2020 (Online)
- 34. Nov. 26-28 5th International Conference on Emerging Electronics (IEEE-ICEE2020)
- 35. Nov. 27 – Dec.4 2020 Virtual MRS Spring/Fall Meeting & Exhibit
Nov. 21-22 The 2024 International Meeting for Future of Electron Devices, Kansai (IMFEDK 2024), Ryukoku Univ., Kyoto, Japan
Thursday, Nov. 21, 11:20-12:20
Session 1: Silicon
12:00-12:20
R01 MEMS resonator-based reservoir computing for epileptic seizure prediction
Shuto Kawaguchi, Amit banerjee, Jun Hirotani, and Toshiyuki Tsuchiya (Kyoto University)
Dec. 1-6, 2024 2024 MRS Fall Meeting & Exhibit (Boston, MA)
SYMPOSIUM NM01:Nanotubes, Graphene and Related Nanostructures
SESSION NM01.05: Poster Session I
Tuesday Afternoon, December 3, 2024 8:00PM – 10:00PM Hynes, Level 1, Hall A
NM01.05.09
Carbon Nanotube Thin Film pn Junction Diode with High Temperature Tolerance Using Chemical Dopants
Yuki Matsunaga1,Haruki Uchiyama1,Haruka Omachi2,Jun Hirotani3
Nagoya University1,Wakayama Medical University2,Kyoto University3
SYMPOSIUM EL03: 2D Materials—Nanofabrication and Applications
SESSION EL03.10: Hybrid and Flexible 2D Materials I
Wednesday Afternoon, December 4, 2024 Sheraton, Second Floor, Back Bay C
EL03.10.02
A Highly Sensitive Flexible Humidity Sensor Based on Ti3C2Tx MXene/Bentonite Thin Film
Hiroya Morotomi1,Yuki Matsunaga2,Lijun Liu3,Hisashi Sugime4,Jun Hirotani1
Kyoto University1,Nagoya University2,Osaka University3,Kindai University4
SYMPOSIUM SB06: 2D Materials for Theranostics
SESSION SB06.05: Poster Session: 2D Materials for Theranostics
Thursday Afternoon, December 5, 2024 8:00PM – 10:00PM Hynes, Level 1, Hall A
SB06.05.10
Thermal Conductivity Measurement of Ti3C2Tx MXene Thin Film Using Frequency-Domain Thermoreflectance
Yuki Akura1,Yuki Matsunaga2,Hiroya Morotomi1,Masaki Shimofuri1,Amit Banerjee1,Toshiyuki Tsuchiya1,Jun Hirotani1
Kyoto University1,Nagoya University2
Jan 22-26, 2025 The 38th International Conference on Micro Electro Mechanical Systems (MEMS 2025) (Kaoshiung, Taiwan)
Poster Session
Improved Learning Performance in Physical Reservoir Computing using Coupled Triple MEMS Nonlinear Resonators
Kosuke Shima, Hiroki Takemura, Masaki Shimofuri, Amit Banerjee, Jun Hirotani and Toshiyuki Tsuchiya
Department of Micro Engineering, Kyoto University, JAPAN
Past Presentations
Jan 21-25 The 37th International Conference on Micro Electro Mechanical Systems (MEMS 2024) (Austin, Texas)
Poster Session Monday, 22 January – 14:55 – 16:55
M21-b EXPLORING SURFACE ACOUSTIC WAVE DEVICES FOR SOUND-BASED RESERVOIR COMPUTING
Robert Meffan, Taiki Ijima, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
March 25-28 The 11th IEEE International Symposium on Inertial Sensors & Systems, INERTIAL 2024 (Hiroshima, JAPAN)
Wednesday March 27th, 2024 16:55-18:00: B4P-B Poster Session II
Single Crystal Lithium Niobate Cylindrical Resonator for High-Performance Miniature Piezoelectric Gyroscope
Kenji Morita, Toshiyuki Tsuchiya, Kazutaka Araya, Tsunehiko Imamura, Masanori Yachi
Theoretical Analysis of (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs
Ayumu Takahashi, Shuya Okayama, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
June 23-26 Asia-Pacific Conference of Transducers and Micro-Nano Technology 2024 (APCOT 2024)
June 25, 9:45 -10:45, Session OS8.4 Micro/Nanofabrication, materials & packaging II
OR-09-1115 Synergistic Effects of Thermal and Electrostatic Resonance Frequency Tuning in Ultrathin Silicon Nanomechanical Resonators
Wei Yu, Amit Banerjee, Jun Hirotani and Toshiyuki Tsuchiya
June 26, 11:15-12:45, Session OS8.4 Micro/Nanofabrication, materials & packaging II
OR-16-0129-R Nanometer-Order Stable Separation Control of Nanogaps with (111) Silicon Cleavage Planes in Vacuum
Masaki Shimofuri, Amit Banerjee, Jun Hirotani and Toshiyuki Tsuchiya
Sept. 16-19 50th international conference on Micro and Nano Engineering (MNE2024) (Montpellier, France)
T2 – Session 1: MEMS
10:45 – 12:00, Tuesday, 17 September 2024
Scalable fabrication of diamond MEMS devices from commercial diamond-on-insulator wafers
Shun-ichiro Matsuda, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya (Kyoto University)
Sept. 22-26 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (Taipei, TAIWAN)
Tuesday, Sep. 24, 14:30-16:00, Poster Session #2: B3aP-19: ASS-P Sensor, Materials and Novel Devices
8033: Development of a Thermal SAW Phase Modulator for Physical Reservoir Computing
Taiki Ijima, Claude Meffen, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
Kyoto University, Japan
Sept. 25-26 2024 IEEE IRDS and International Nanodevices and Computing Conference (INC) (Online)
Thursday, Sep. 26, 4:10 pm – 5:20 pm (EDT), Session 4 SDRJ
4:50 pm: Toward Sound-Based Reservoir Computing using Surface Acoustic Wave Devices
Toshiyuki Tsuchiya, Kyoto University
Nov. 10-14 The 34th International Symposium on Transport Phenomena (ISTP-34) (Taoyuan Convention and Exhibition Center, Taoyuan, Taiwan)
Wednesday, Nov. 13, 10:50~12:20, Room 302
Micro- and Nano-Scale Transport II
10:50 – 11:05
Estimation of Thermal Conductivity Profile in Depth Direction Using Machine Learning in Frequency Domain Thermoreflectance
Y. Ikeda, Y. Akura, M. Shimofuri, A. Banerjee, T. Tsuchiya, and J. Hirotani, Kyoto Univ, Japan
11:20 – 11:35
Flexible Three-Omega Sensors Fabricated on Parylene Substrates
R. Yamasaki1, Y. Matsunaga2, M. Shimofuri1, A. Banerjee1, T. Tsuchiya1, and J. Hirotani1, 1Kyoto Univ., Japan, 2Nagoya Univ., Japan
Nov. 12-15 37th International Microprocesses and Nanotechnology Conference (MNC 2024) (Kyoto Brighton Hotel, Kyoto, Japan)
14P-1: Poster Session I (16:10-18:10, Nov. 14), Room P (Hanabusa) (B1F)
Nanocarbons & 2D Materials
14P-1-25
Thermal Conductivity of Ti3C2Tx MXene Thin Film Measured by Frequencydomain Thermoreflectance
Yuki Akura 1, Yuki Matsunaga 2, Hiroya Morotomi 1, Masaki Shimofuri 1, Amit Banerjee 1,
Toshiyuki Tsuchiya 1 and Jun Hirotani 1, 1 Kyoto Univ. and 2 Nagoya Univ., Japan
Nanodevices
14P-1-43
Tunable Si NEMS resonators for frequency-domain physical reservoir computing
Shuto Kawaguchi, Yu Wei, Amit Banerjee, Jun Hirotani and Toshiyuki Tsuchiya, Kyoto Univ., Japan
15B-3: Microsystem Technology and MEMS II (Nov. 15. 13:30-15:10)
15B-3-1 13:30
Nonlinear thermo-acoustic phase modulator for physical reservoir computing
Taiki Ijima, Claude Meffan, Amit Banerjee, Jun Hirotani and Toshiyuki Tsuchiya, Kyoto Univ., Japan
15B-3-5 14:50
Fabrication and resonant characteristics of diamond MEMS resonators
Shunichiro Matsuda, Amit Banerjee, Masaki Shimofuri, Jun Hirotani and Toshiyuki Tsuchiya, Kyoto Univ., Japan
15P-1: Poster Session II (15:30-17:30, Nov. 15), Room P (Hanabusa) (B1F)
Microsystem Technology and MEMS
15P-1-48
(100) silicon ring gyroscope with rectangle springs aiming at frequency and thermoelastic Qfactor
matching
Ayumu Takahashi, Amit BanerJee, Jun Hirotani and Toshiyuki Tsuchiya, Kyoto Univ., Japan
15P-1-51
Noncontact measurement of TiNi film surface temperature using laser reflected light
Taichi Murakami 1, Masaki Sshimofuri 2, Toshiyuki Tsuchiya 2 and Shugo Miyake, 1 Setsunan Univ. and 2 Kyoto Univ., Japan
Jan. 15-19, 2023 The 36th International Conference on Micro Electro Mechanical Systems (MEMS 2022) (Munich, Germany)
Poster Session I Monday, 16 January 14:45 – 16:15
- 136-e IONIC LIQUID ELECTROSPRAY THRUSTER WITH TWO-STAGE ELECTRODES ON GLASS SUBSTRATE
Akane Nishimura1, Yoshinori Takao2, and Toshiyuki Tsuchiya1
1 Kyoto University, JAPAN and 2 Yokohama National University, JAPAN
Poster Session III Wednesay, 18 January 14:00 – 15:30
- 321-b PHYSICAL RESERVOIR COMPUTING USING NONLINEAR MEMS RESONATOR HAVING HIGH MEMORY CAPACITY AT "EDGE OF CHAOS"
Hiroki Takemura, Takahiro Mizumoto, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
Kyoto University, JAPAN
Feb. 3 2023 Symposium on User-Facility Network in Asia
- 14:05 Nanotechnology Hub in Kyoto Univ. -Facility and Material Data Network Hub for Next-Generation Polymers & Multi-Materials
Toshiyuki Tsuchiya, Kyoto University, Japan
March 28-31 The 10th IEEE International Symposium on Inertial Sensors & Systems, INERTIAL 2023 (Kaua’i, Hawaii, USA)
Mar 29, 2023, 11:25-12:30: A2L-A MEMS Gyroscope
- A2L-A-3 A New Design of MODE-Matched (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs Immune to Fabrication Errors
Shuya Okayama, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
May 14-17 The 18th International Conference on Nano/Micro Engineered and Molecular Systems: IEEE-NEMS2023 (Jeju, Korea)
- Simulation Model to Characterize Volumetric Flow Rate Generated by Polydimethylsiloxane Peristaltic Micropump for Body-on-a-Chip
Jiandong Yang, Yoshikazu HIRAI, Ken-ichiro KAMEI, Osamu Tabata, Toshiyuki TSUCHIYA
June 25-29 The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems: Transducers 2023 (Kyoto, Japan)
Poster Session: Tuesday, 26 June 14:15 – 16:15
- T4P.009 Micro-Fabricated Bi-Stable Mechanical Switch Actuated by Single Thermal Actuator
Jiacheng Liu1, Yuma Ohara2, Zerui Xu3, Ruizi Liu1, Zhangshanhao Li3, Xiaohong Wang3, Toshiyuki Tsuchiya2, and Man Wong1
1 Hong Kong University of Science and Technology, HONG KONG, 2 Kyoto University, JAPAN, and 3 Tsinghua University, CHINA
- T4P.077 Human Activity Recognition using Intelligent Resonant Accelerometer Employing MEMS Reservoir Computing
Takahiro Mizumoto, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
Kyoto University, JAPAN
9/18 Deep learning meets Neuromorphic Hardware (a Workshop of European Conference on Machine Learning and Principles and Practice of Knowledge Discovery in Databases) (Turin, Italy)
- 104 Optimisation of a physical reservoir computer’s parameters using a genetic algorithm
Claude Meffan (Kyoto University); Taiki Ijima (Kyoto University); Amit Banerjee (Kyoto University); Jun Hirotani (Kyoto University); Toshiyuki Tsuchiya (Kyoto University)
9/25-28 49th international conference on Micro and Nano Engineering (MNE2023) (Berlin, Germany)
Wednesday, 27 September, 3:00pm – 4:15pm Track 2- Fabrication and Integration of Micro/Nano Structures, Devices and Systems
- Development of surface acoustic wave phase modulators for physical reservoir computing
Taiki Ijima, Claude Meffan, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
Wednesday, 27 September, 3:00pm – 4:15pm Track3 – Micro/Nano Engineering for Life Sciences / Track4 – Micro/Nano Engineering for Physical and Chemical Applications
- Electrode Design Using Multi-Material Topology Optimization for Accurate Measurement of Trans-Epithelial Electrical Resistance in Organ-on-a-Chip
Haruki Goda, Naoyuki Ishida, Kozo Furuta, Kazuhiro Izui, Fred van Keulen, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata, Yoshikazu Hirai
Poster Session2.1: Trak 2
Wednesday, 27, 4:15pm – 6:30pm
- Synchronous vibration of 1×2 torsional micromirror array
Mikiya Oki, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya - Ultrathin Si nanostring resonators with widely tunable dynamic behaviour
Amit Banerjee, Wei Yu, Jun Hirotani, Toshiyuki Tsuchiya - Optimisation of a physical reservoir computer’s parameters using a genetic algorithm non-linear search
Claude Meffan, Taiki Ijima, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
11/14-17 36th International Microprocesses and Nanotechnology Conference (MNC 2023) (JR Hotel Clement, Tokushima)
16P-1: Poster Session I (14:00-16:00, Nov. 16), Room P (Eminence Hall) (2F)
BioMEMS, Lab on a Chip, and Nanobiotechnology
- 16P-1-87
Developing a MEMS reservoir-computer for real-time epileptic seizure detection
Amit Banerjee, Shuto Kawaguchi, Claude Meffan, Jun Hirotani, Toshiyuki Tsuchiya, Kyoto Univ., Japan
17B-2:Nano-devices IV (11:00-12:00, Nov. 17), Room B (Rose Room) (2F)
- 17B-2-1 11:00
Developing Effective Si Nanoresonator Devices for Ultrasensitive Gas Sensing
Wei Yu, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya, Kyoto Univ., Japan
Jan. 9-13, 2022 The 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022) (Tokyo, JAPAN, Hybrid)
Virtual Poster Session I Monday, 10 January 22:00 – 23:30
118-b OBSERVATION OF PULL-IN BY CASIMIR FORCE IN MEMS-CONTROLLED NANOGAP FABRICATED BY SILICON CLEAVAGE
Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee, and Toshiyuki Tsuchiya
Kyoto University, JAPAN
Virtual Poster Session II Tuesday, 11 January 05:00 – 06:30
209-b MEMS RESERVOIR COMPUTING USING FREQUENCY MODULATED ACCELEROMETER
Takahirio Mizumoto, Yoshikazu Hirai, Amit Banerjee, and Toshiyuki Tsuchiya
Kyoto University, JAPAN
Session XIV – Microfluidic Devices, Thursday, 13 January 13:30 – 14:30
13:45 FIELD EFFECT TRANSISTOR-LIKE CONTROL OF CAPILLARIC FLOW USING OFF VALVES
Claude Meffan, Julian Menges, Daniel Mak, Fabian Dolamore, Conan Fee, Renwick Dobson, and Volker Nock
University of Canterbury, NEW ZEALAND
Feb. 28-Mar. 4 The 33rd International Symposium on Space Technology and Science (ISTS 2022) (Oita, Online)
[B-7] Electrospray Thrusters / Advanced Micro Thrusters, Wed. Mar 2, 2022 4:00 PM – 5:00 PM
4:00 PM – 4:20 PM
[2022-b-28] Design and fabrication of ionic liquid electrospray thruster with two-stage electrodes
*Akane Nishimura1, Yoshinori Takao2, Toshiyuki Tsuchiya1 (1. Kyoto University, 2. Yokohama National University)
May 8-13 2022 MRS Spring Meeting (Honolulu, HI)
Symposium MF01 – Cutting-Edge Plasma Processes Contributing to Sustainable Development Goals
5:00 PM, May 10 – MF01.07.01
Fluid Leak Detector for Cyclo-Olefin Polymer Microchannels Using Low-Temperature Bonding by Water Vapor Plasma
Masaaki Tsukamoto1,2, Hirokazu Terai1, Madoka Tsumaya1, Shigeru Kurosawa1,
Osamu Tsuji1, Masashi Satou2, Yoshiyuki Inoue2, Keiko Kawano2, Tomoaki Matsushima2, Toshiyuki Tsuchiya2
Samco Inc.1, Kyoto University2
May 29-June 1 Asia-Pacific Conference of Transducers and Micro-Nano Technology 2022 (APCOT 2022)
May 30, 9:15 -10:45, Session1
[Plenary] Toshiyuki TsuchiyaMEMS Reservoir Computing -Sensors Become More Intelligent-
June 29-30 International Conference and Exhibition on New Actuator Systems and Applications (Actuator 2022)
Thursday, June 30 09:00 – 12:40, B4 Actuator Control and Electronics
S. Xie, R. Liu, S. Okayama, T. Tsuchiya, M. Wong and X. Wang, “A Planar Single-Actuator Bi-Stable Mechanical/Electrical Switch," ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications, 2022, B4-5
August 28-31 2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022) (Nagoya, Japan)
Mon. Aug 29, 2022 2:00PM-3:15PM Room C Micro/Nano Mechanical Systems 3
[C1-3-04] Characterization of gap-distance dependency on field emission at nanogap between silicon cleavage surfaces by numerical calculations
*Yuki Akura1, Masaki Shimofuri1, Amit Banerjee1, Jun Hirotani1,2, Toshiyuki Tsuchiya1 (1. Kyoto Univ., 2. JST PRESTO)
*WEI YU1, Amit Banerjee1, Jun Hirotani1, Toshiyuki Tsuchiya1 (1. Kyoto University)
Tue. Aug 30, 2022 11:00 AM – 12:30 PM Room A Machine Learning and Intelligent Mechanical Systems 1
[A2-2-03] A non-linear SAW resonator as a reservoir computing node
*Claude Meffan1, Amit Banerjee1, Jun Hirotani1, Toshiyuki Tsuchiya1 (1. Kyoto University)
Tue. Aug 30, 2022 11:00AM-12:15PM Room C Micro/Nano Mechanical Systems 5
[C2-2-04] Alternating a-C:H Coating Effect on Torsional Strength of Silicon Beam for Micromirrors
*Yuanlin Xia1, Amit Banerjee1, Jun Hirotani1, Toshiyuki Tsuchiya1 (1. Kyoto University)
Nov. 8-11 35th International Microprocesses and Nanotechnology Conference (MNC 2022) (JR Hotel Clement, Tokushima)
Thursday, November 10, 13:30-14:50 10B-3: CNTs
14:30 10B-3-4: Highly temperature-tolerant p-type carbon nanotube transistor doped with 1,4,5,8,9,11-
hexaazatriphenylenehexacarbonitrile
Yuki Matsunaga1, Jun Hirotani2,3, Haruka Omachi1, 1 Nagoya Univ., 2 Kyoto Univ. and 3 JST-PREST, Japan
Thursday, November 10, 9:30-11:30, Poster Session 1: Nanocarbons & 2D Materials
10P-1-2: Exfoliation of Al-residual Ti3C2Tx MXene by using tetramethylammonium bases and conductive film applications
Yuki Shibata1, Emi Saita1, Masaki Iwata1, Yuki Matsunaga1, Rie Suizu1,2, Kunio Awaga1, Jun Hirotani2,3 and Haruka Omachi1, 1 Nagoya Univ., 2 JST-PRESTO and 3 Kyoto Univ., Japan
Jan. 25-29 The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021) (Online)
HIGHLY ACCURATE MEASUREMENT OF TRANS-EPITHELIAL ELECTRICAL RESISTANCE IN ORGAN-ON-A-CHIP
Takashi Miyazaki1, Jiandong Yang1, Satoshi Imamura1, Yoshikazu Hirai1, Ken-ichiro Kamei1, Toshiyuki Tsuchiya1, and Osamu Tabata1,2
1Kyoto University, 2Kyoto University of Advanced Science
June 20-25 The 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021) (Online)
B2-2D1 MULTILAYERED MICROFLUIDIC DEVICE FOR CONTROLLABLE FLOW PERFUSION OF GUT-LIVER ON A CHIP
Jiandong Yang1, Satoshi Imamura1, Yoshikazu Hirai1, Ken-ichiro Kamei1, Toshiyuki Tsuchiya1, and Osamu Tabata1,2
1Kyoto University, Kyoto, JAPAN and 2Kyoto University of Advanced Science, Kyoto, JAPAN
B5-5D3 GRAVITY AND FILM STRESS ANALYSIS FOR MEMS DEFORMABLE MIRROR WITH ELECTROSTATIC PISTON ARRAY
Toshiyuki Tsuchiya1, Toshiki Ema1, Yoshikazu Hirai1, Christopher Welham2 and Hideyuki Maekoba2
1 Kyoto University, Kyoto, JAPAN, 2 Coventor, A Lam Research Company
B5-507a HIGH DURABILITY LATCH-LOCK BI-STABLE SWITCH ON Y-SHAPED CANTILEVER
Zili Tang1, Qi Tao2, Zehua Lan3, Zong Liu1, Toshiyuki Tsuchiya4, Xiaohong Wang3, and Man Wong1
1 Hong Kong University of Science and Technology, HONG KONG, 2 China Academy of Engineering Physics, Beijing, CHINA, 3 Tsing Hua University, Beijing, CHINA, 4 Kyoto University, Kyoto, JAPAN
B2-2A6 A PLANAR SINGLE-ACTUATOR BI-STABLE SWITCH BASED ON HOOKLESS MECHANISM
Zehua Lan1, Qi Tao2, Zili Tang3, Toshiyuki Tsuchiya4, Man Wong3, and Xiaohong Wang1
1Tsinghua University, CHINA, 2China Academy of Engineering Physics, CHINA,
3Hong Kong University of Science and Technology, CHINA, and 4Kyoto University, JAPAN
[Just-in Press Session]
B6-JI1A1 MICROFABRICATED ALKALI METAL VAPOR CELLS FILLED WITH AN ON-CHIP DISPENSING COMPONENT
Shun Kiyose1, Yoshikazu Hirai1, Osamu Tabata2, and Toshiyuki Tsuchiya1
1Kyoto University, JAPAN and 2Kyoto University of Advanced Science, JAPAN
[TUTORIAL] Short Course 1: KEY TECHNOLOGIES AVAILABLE IN NANOFABRICATION CENTERS WORLDWIDE
SC1-2T1 FABRICATION OF CYCLO-OLEFIN POLYMER-BASED MICROFLUIDIC DEVICE USING WATER VAPOR PLASMA ACTIVATED BONDING
Toshiyuki Tsuchiya
Kyoto University, JAPAN
Sept. 20-23 Micro and Nano Engineering Conference (Turin, Italy / Hybrid)
Session C1: MEMS/NEMS Technology
Tuesday, September 21 10:45-12:45 am CET
11:45am Wineglass mode MEMS gyroscopes with single crystal materials (INVITED)
Toshiyuki Tsuchiya (Kyoto University)
Oct. 26-29 34th International Microprocesses and Nanotechnology Conference (MNC 2021) (Online)
29C-3: Microsystem Technology and MEMS Session III
Friday, October 29 13:30-14:50
13:30 29C-3-1 SOI-MEMS device for fabrication and physical properties measurement of single-crystal silicon nanogap with (111) cleavage plane surfaces
Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee and Toshiyuki Tsuchiya, Kyoto Univ., Japan
Sept. 27-30 Virtual IEEE NEMS 2020 (Online)
IS8: Micro/Nano Engineering for Advanced Bio/Medical Systems Tuesday, September 29 11:20 -13:00 (日本時間9/30 0:20-2:00)
IS8.6 (Invited) Microfluidic platform fabricated by three-dimensional lithography enables drug test and disease modeling in vitro
Yoshikazu HIRAI, Kyoto Univ., Japan
Oct. 4-9 μTAS2020 (Online)
e – Cells, Organisms and Organs on a Chip -Organs on Chip
T3-353.e HEART-LIVER ON A CHIP INTEGRATED WITH A MICROELECTRODE ARRAY TO MONITOR EXTRACELLULAR FIELD POTENTIALS OF CARDIOMYOCYTES
Dongxiao Zhang1, Yoshikazu Hirai1, Ken-ichiro Kamei1, Osamu Tabata1,2, and Toshiyuki Tsuchiya1
1Kyoto University, JAPAN and 2Kyoto University of Advanced Science, JAPAN
Nov. 9-12 MNC2020 (Online)
5-1: Microsystem Technology and MEMS I
2020-5-8 Microfabricated Vapor Cells with Monolithically Integrated Alkali Metal Dispensing Component
Shun Kiyose1, Yoshikazu Hirai1, Osamu Tabata1,2, Toshiyuki Tsuchiya1 (1 Kyoto Univ., 2 Kyoto Univ. of Advanced Sci.)
5-3: Microsystem Technology and MEMS III
2020-5-22 Tensile Strength of Single-Crystal Silicon Microstructure with Stepwise Bias-graded a-C:H Coating
Yuanlin Xia, Yoshikazu Hirai, Toshiyuki Tsuchiya (Kyoto Univ.)
2020-5-23 Ionic Liquid Electrospray Thrusters with Uniform Needle-Emitter Arrays for Precise ThrustControl
Fumiya Tachibana1, Toshiyuki Tsuchiya2 and Yoshinori Takao1 (1 Yokohama Natl. Univ., 2 Kyoto Univ.)
Nov. 26-28 5th International Conference on Emerging Electronics (IEEE-ICEE2020)
MEMS NEMS AND MICROFLUIDICS
[Invited lecture 5] Single-Crystal Lithium Niobate Piezoelectric Vibratory Disk GyroscopeToshiyuki Tsuchiya (Kyoto Univ., Japan)
Nov. 27 – Dec.4 2020 Virtual MRS Spring/Fall Meeting & Exhibit
S.SM01.02: Organ on a Chip
S.SM01.02.02 In Vitro Modeling of Non-Alcoholic Fatty Liver Disease by Integrated Gut-Liver on a Chip Jiandong Yang1,Yoshikazu Hirai1,Ken-ichiro Kamei1,Marika Trumm2,1,Toshiyuki Tsuchiya1,Osamu Tabata1
Kyoto University1,Heidelberg University2