Conference Presentations

Contents

Jan. 15-19, 2023 The 36th International Conference on Micro Electro Mechanical Systems (MEMS 2022) (Munich, Germany)

Poster Session I Monday, 16 January 14:45 – 16:15

136-e IONIC LIQUID ELECTROSPRAY THRUSTER WITH TWO-STAGE ELECTRODES ON GLASS SUBSTRATE
Akane Nishimura1, Yoshinori Takao2, and Toshiyuki Tsuchiya1
1 Kyoto University, JAPAN and 2 Yokohama National University, JAPAN

Poster Session III Wednesay, 18 January 14:00 – 15:30

321-b PHYSICAL RESERVOIR COMPUTING USING NONLINEAR MEMS RESONATOR HAVING HIGH MEMORY CAPACITY AT "EDGE OF CHAOS"
Hiroki Takemura, Takahiro Mizumoto, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
Kyoto University, JAPAN


Past Presentations

Jan. 9-13, 2022 The 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022) (Tokyo, JAPAN, Hybrid)

Virtual Poster Session I Monday, 10 January 22:00 – 23:30
118-b OBSERVATION OF PULL-IN BY CASIMIR FORCE IN MEMS-CONTROLLED NANOGAP FABRICATED BY SILICON CLEAVAGE
Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee, and Toshiyuki Tsuchiya
Kyoto University, JAPAN

Virtual Poster Session II Tuesday, 11 January 05:00 – 06:30
209-b MEMS RESERVOIR COMPUTING USING FREQUENCY MODULATED ACCELEROMETER
Takahirio Mizumoto, Yoshikazu Hirai, Amit Banerjee, and Toshiyuki Tsuchiya
Kyoto University, JAPAN

Session XIV – Microfluidic Devices, Thursday, 13 January 13:30 – 14:30
13:45 FIELD EFFECT TRANSISTOR-LIKE CONTROL OF CAPILLARIC FLOW USING OFF VALVES
Claude Meffan, Julian Menges, Daniel Mak, Fabian Dolamore, Conan Fee, Renwick Dobson, and Volker Nock
University of Canterbury, NEW ZEALAND

Feb. 28-Mar. 4 The 33rd International Symposium on Space Technology and Science (ISTS 2022) (Oita, Online)

[B-7] Electrospray Thrusters / Advanced Micro Thrusters, Wed. Mar 2, 2022 4:00 PM – 5:00 PM
4:00 PM – 4:20 PM
[2022-b-28] Design and fabrication of ionic liquid electrospray thruster with two-stage electrodes
*Akane Nishimura1, Yoshinori Takao2, Toshiyuki Tsuchiya1 (1. Kyoto University, 2. Yokohama National University)

May 8-13 2022 MRS Spring Meeting (Honolulu, HI)

Symposium MF01 – Cutting-Edge Plasma Processes Contributing to Sustainable Development Goals
5:00 PM, May 10 – MF01.07.01
Fluid Leak Detector for Cyclo-Olefin Polymer Microchannels Using Low-Temperature Bonding by Water Vapor Plasma
Masaaki Tsukamoto1,2, Hirokazu Terai1, Madoka Tsumaya1, Shigeru Kurosawa1, Osamu Tsuji1, Masashi Satou2, Yoshiyuki Inoue2, Keiko Kawano2, Tomoaki Matsushima2, Toshiyuki Tsuchiya2
Samco Inc.1, Kyoto University2

May 29-June 1 Asia-Pacific Conference of Transducers and Micro-Nano Technology 2022 (APCOT 2022)

May 30, 9:15 -10:45, Session1

[Plenary] Toshiyuki Tsuchiya
MEMS Reservoir Computing -Sensors Become More Intelligent-

June 29-30 International Conference and Exhibition on New Actuator Systems and Applications (Actuator 2022)

Thursday, June 30 09:00 – 12:40, B4 Actuator Control and Electronics

S. Xie, R. Liu, S. Okayama, T. Tsuchiya, M. Wong and X. Wang, “A Planar Single-Actuator Bi-Stable Mechanical/Electrical Switch," ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications, 2022, B4-5

August 28-31 2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022) (Nagoya, Japan)

Mon. Aug 29, 2022 2:00PM-3:15PM Room C Micro/Nano Mechanical Systems 3
[C1-3-04] Characterization of gap-distance dependency on field emission at nanogap between silicon cleavage surfaces by numerical calculations
*Yuki Akura1, Masaki Shimofuri1, Amit Banerjee1, Jun Hirotani1,2, Toshiyuki Tsuchiya1 (1. Kyoto Univ., 2. JST PRESTO)

[C1-3-05] Fabrication and Dynamic Characterization of Ultrathin Si NEMS Resonators
*WEI YU1, Amit Banerjee1, Jun Hirotani1, Toshiyuki Tsuchiya1 (1. Kyoto University)

Tue. Aug 30, 2022 11:00 AM – 12:30 PM Room A Machine Learning and Intelligent Mechanical Systems 1
[A2-2-03] A non-linear SAW resonator as a reservoir computing node
*Claude Meffan1, Amit Banerjee1, Jun Hirotani1, Toshiyuki Tsuchiya1 (1. Kyoto University)

Tue. Aug 30, 2022 11:00AM-12:15PM Room C Micro/Nano Mechanical Systems 5
[C2-2-04] Alternating a-C:H Coating Effect on Torsional Strength of Silicon Beam for Micromirrors
*Yuanlin Xia1, Amit Banerjee1, Jun Hirotani1, Toshiyuki Tsuchiya1 (1. Kyoto University)

Nov. 8-11 35th International Microprocesses and Nanotechnology Conference (MNC 2022) (JR Hotel Clement, Tokushima)

Thursday, November 10, 13:30-14:50 10B-3: CNTs

14:30 10B-3-4: Highly temperature-tolerant p-type carbon nanotube transistor doped with 1,4,5,8,9,11-
hexaazatriphenylenehexacarbonitrile
Yuki Matsunaga1, Jun Hirotani2,3, Haruka Omachi1, 1 Nagoya Univ., 2 Kyoto Univ. and 3 JST-PREST, Japan

Thursday, November 10, 9:30-11:30, Poster Session 1: Nanocarbons & 2D Materials

10P-1-2: Exfoliation of Al-residual Ti3C2Tx MXene by using tetramethylammonium bases and conductive film applications
Yuki Shibata1, Emi Saita1, Masaki Iwata1, Yuki Matsunaga1, Rie Suizu1,2, Kunio Awaga1, Jun Hirotani2,3 and Haruka Omachi1, 1 Nagoya Univ., 2 JST-PRESTO and 3 Kyoto Univ., Japan

Jan. 25-29 The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021) (Online)

HIGHLY ACCURATE MEASUREMENT OF TRANS-EPITHELIAL ELECTRICAL RESISTANCE IN ORGAN-ON-A-CHIP
Takashi Miyazaki1, Jiandong Yang1, Satoshi Imamura1, Yoshikazu Hirai1, Ken-ichiro Kamei1, Toshiyuki Tsuchiya1, and Osamu Tabata1,2
1Kyoto University, 2Kyoto University of Advanced Science

June 20-25 The 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021) (Online)

B2-2D1 MULTILAYERED MICROFLUIDIC DEVICE FOR CONTROLLABLE FLOW PERFUSION OF GUT-LIVER ON A CHIP
Jiandong Yang1, Satoshi Imamura1, Yoshikazu Hirai1, Ken-ichiro Kamei1, Toshiyuki Tsuchiya1, and Osamu Tabata1,2
1Kyoto University, Kyoto, JAPAN and 2Kyoto University of Advanced Science, Kyoto, JAPAN

B5-5D3 GRAVITY AND FILM STRESS ANALYSIS FOR MEMS DEFORMABLE MIRROR WITH ELECTROSTATIC PISTON ARRAY
Toshiyuki Tsuchiya1, Toshiki Ema1, Yoshikazu Hirai1, Christopher Welham2 and Hideyuki Maekoba2
1 Kyoto University, Kyoto, JAPAN, 2 Coventor, A Lam Research Company

B5-507a HIGH DURABILITY LATCH-LOCK BI-STABLE SWITCH ON Y-SHAPED CANTILEVER
Zili Tang1, Qi Tao2, Zehua Lan3, Zong Liu1, Toshiyuki Tsuchiya4, Xiaohong Wang3, and Man Wong1
1 Hong Kong University of Science and Technology, HONG KONG, 2 China Academy of Engineering Physics, Beijing, CHINA, 3 Tsing Hua University, Beijing, CHINA, 4 Kyoto University, Kyoto, JAPAN

B2-2A6 A PLANAR SINGLE-ACTUATOR BI-STABLE SWITCH BASED ON HOOKLESS MECHANISM
Zehua Lan1, Qi Tao2, Zili Tang3, Toshiyuki Tsuchiya4, Man Wong3, and Xiaohong Wang1
1Tsinghua University, CHINA, 2China Academy of Engineering Physics, CHINA,
3Hong Kong University of Science and Technology, CHINA, and 4Kyoto University, JAPAN

[Just-in Press Session]

B6-JI1A1 MICROFABRICATED ALKALI METAL VAPOR CELLS FILLED WITH AN ON-CHIP DISPENSING COMPONENT
Shun Kiyose1, Yoshikazu Hirai1, Osamu Tabata2, and Toshiyuki Tsuchiya1
1Kyoto University, JAPAN and 2Kyoto University of Advanced Science, JAPAN

[TUTORIAL] Short Course 1: KEY TECHNOLOGIES AVAILABLE IN NANOFABRICATION CENTERS WORLDWIDE

SC1-2T1 FABRICATION OF CYCLO-OLEFIN POLYMER-BASED MICROFLUIDIC DEVICE USING WATER VAPOR PLASMA ACTIVATED BONDING
Toshiyuki Tsuchiya
Kyoto University, JAPAN

Sept. 20-23 Micro and Nano Engineering Conference (Turin, Italy / Hybrid)

Session C1: MEMS/NEMS Technology
Tuesday, September 21 10:45-12:45 am CET

11:45am Wineglass mode MEMS gyroscopes with single crystal materials (INVITED)
Toshiyuki Tsuchiya (Kyoto University)

Oct. 26-29 34th International Microprocesses and Nanotechnology Conference (MNC 2021) (Online)

29C-3: Microsystem Technology and MEMS Session III
Friday, October 29 13:30-14:50

13:30 29C-3-1 SOI-MEMS device for fabrication and physical properties measurement of single-crystal silicon nanogap with (111) cleavage plane surfaces
Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee and Toshiyuki Tsuchiya, Kyoto Univ., Japan

Sept. 27-30 Virtual IEEE NEMS 2020 (Online)

IS8: Micro/Nano Engineering for Advanced Bio/Medical Systems Tuesday, September 29 11:20 -13:00 (日本時間9/30 0:20-2:00)

IS8.6 (Invited) Microfluidic platform fabricated by three-dimensional lithography enables drug test and disease modeling in vitro
Yoshikazu HIRAI, Kyoto Univ., Japan

Oct. 4-9 μTAS2020 (Online)

e – Cells, Organisms and Organs on a Chip -Organs on Chip
T3-353.e HEART-LIVER ON A CHIP INTEGRATED WITH A MICROELECTRODE ARRAY TO MONITOR EXTRACELLULAR FIELD POTENTIALS OF CARDIOMYOCYTES
Dongxiao Zhang1, Yoshikazu Hirai1, Ken-ichiro Kamei1, Osamu Tabata1,2, and Toshiyuki Tsuchiya1
1Kyoto University, JAPAN and 2Kyoto University of Advanced Science, JAPAN

Nov. 9-12 MNC2020 (Online)

5-1: Microsystem Technology and MEMS I
2020-5-8 Microfabricated Vapor Cells with Monolithically Integrated Alkali Metal Dispensing Component
Shun Kiyose1, Yoshikazu Hirai1, Osamu Tabata1,2, Toshiyuki Tsuchiya1 (1 Kyoto Univ., 2 Kyoto Univ. of Advanced Sci.)

5-3: Microsystem Technology and MEMS III
2020-5-22 Tensile Strength of Single-Crystal Silicon Microstructure with Stepwise Bias-graded a-C:H Coating
Yuanlin Xia, Yoshikazu Hirai, Toshiyuki Tsuchiya (Kyoto Univ.)

2020-5-23 Ionic Liquid Electrospray Thrusters with Uniform Needle-Emitter Arrays for Precise ThrustControl
Fumiya Tachibana1, Toshiyuki Tsuchiya2 and Yoshinori Takao1 (1 Yokohama Natl. Univ., 2 Kyoto Univ.)

Nov. 26-28 5th International Conference on Emerging Electronics (IEEE-ICEE2020)

MEMS NEMS AND MICROFLUIDICS

[Invited lecture 5] Single-Crystal Lithium Niobate Piezoelectric Vibratory Disk Gyroscope
Toshiyuki Tsuchiya (Kyoto Univ., Japan)

Nov. 27 – Dec.4 2020 Virtual MRS Spring/Fall Meeting & Exhibit

S.SM01.02: Organ on a Chip

S.SM01.02.02 In Vitro Modeling of Non-Alcoholic Fatty Liver Disease by Integrated Gut-Liver on a Chip Jiandong Yang1,Yoshikazu Hirai1,Ken-ichiro Kamei1,Marika Trumm2,1,Toshiyuki Tsuchiya1,Osamu Tabata1
Kyoto University1,Heidelberg University2

2022年4月28日News