Conference Presentations

Jan. 15-19, 2023 The 36th International Conference on Micro Electro Mechanical Systems (MEMS 2022) (Munich, Germany)

Poster Session I Monday, 16 January 14:45 – 16:15

• 136-e IONIC LIQUID ELECTROSPRAY THRUSTER WITH TWO-STAGE ELECTRODES ON GLASS SUBSTRATE
  Akane Nishimura¹, Yoshinori Takao², and Toshiyuki Tsuchiya¹
  1 Kyoto University, JAPAN and 2 Yokohama National University, JAPAN

Poster Session III Wednesay, 18 January 14:00 – 15:30

• 321-b PHYSICAL RESERVOIR COMPUTING USING NONLINEAR MEMS RESONATOR HAVING HIGH MEMORY CAPACITY AT "EDGE OF CHAOS"
  Hiroki Takemura, Takahiro Mizumoto, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
  Kyoto University, JAPAN

Feb. 3 2023 Symposium on User-Facility Network in Asia

• 14:05 Nanotechnology Hub in Kyoto Univ. -Facility and Material Data Network Hub for Next-Generation Polymers & Multi-Materials
  Toshiyuki Tsuchiya, Kyoto University, Japan

March 28-31 The 10th IEEE International Symposium on Inertial Sensors & Systems, INERTIAL 2023 (Kaua’i, Hawaii, USA)

Mar 29, 2023, 11:25-12:30: A2L-A MEMS Gyroscope

• A2L-A-3 A New Design of MODE-Matched (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs Immune to Fabrication Errors
  Shuya Okayama, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya

May 14-17 The 18th International Conference on Nano/Micro Engineered and Molecular Systems: IEEE-NEMS2023 (Jeju, Korea)

• Simulation Model to Characterize Volumetric Flow Rate Generated by Polydimethylsiloxane Peristaltic Micropump for Body-on-a-Chip
  Jiandong Yang, Yoshikazu HIRAI, Ken-ichiro KAMEI, Osamu Tabata, Toshiyuki TSUCHIYA

June 25-29 The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems: Transducers 2023 (Kyoto, Japan)

Poster Session: Tuesday, 26 June 14:15 – 16:15

• T4P.009 Micro-Fabricated Bi-Stable Mechanical Switch Actuated by Single Thermal Actuator
  Jiacheng Liu¹, Yuma Ohara², Zerui Xu³, Ruizi Liu¹, Zhangshanhao Li³, Xiaohong Wang³, Toshiyuki Tsuchiya^2, and Man Wong¹
  1 Hong Kong University of Science and Technology, HONG KONG, 2 Kyoto University, JAPAN, and 3 Tsinghua University, CHINA

• T4P.077 Human Activity Recognition using Intelligent Resonant Accelerometer Employing MEMS Reservoir Computing
  Takahiro Mizumoto, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
  Kyoto University, JAPAN

9/18 Deep learning meets Neuromorphic Hardware (a Workshop of European Conference on Machine Learning and Principles and Practice of Knowledge Discovery in Databases) (Turin, Italy)

• 104 Optimisation of a physical reservoir computer’s parameters using a genetic algorithm
  Claude Meffan (Kyoto University); Taiki Ijima (Kyoto University); Amit Banerjee (Kyoto University); Jun Hirotani (Kyoto University); Toshiyuki Tsuchiya (Kyoto University)

9/25-28 49th international conference on Micro and Nano Engineering (MNE2023) (Berlin, Germany)

Wednesday, 27 September, 3:00pm – 4:15pm Track 2- Fabrication and Integration of Micro/Nano Structures, Devices and Systems

• Development of surface acoustic wave phase modulators for physical reservoir computing
  Taiki Ijima, Claude Meffan, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya

Wednesday, 27 September, 3:00pm – 4:15pm Track3 – Micro/Nano Engineering for Life Sciences / Track4 – Micro/Nano Engineering for Physical and Chemical Applications

• Electrode Design Using Multi-Material Topology Optimization for Accurate Measurement of Trans-Epithelial Electrical Resistance in Organ-on-a-Chip
  Haruki Goda, Naoyuki Ishida, Kozo Furuta, Kazuhiro Izui, Fred van Keulen, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata, Yoshikazu Hirai

Poster Session2.1: Trak 2
Wednesday, 27, 4:15pm – 6:30pm

• Synchronous vibration of 1×2 torsional micromirror array
  Mikiya Oki, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
• Ultrathin Si nanostring resonators with widely tunable dynamic behaviour
  Amit Banerjee, Wei Yu, Jun Hirotani, Toshiyuki Tsuchiya
• Optimisation of a physical reservoir computer’s parameters using a genetic algorithm non-linear search
  Claude Meffan, Taiki Ijima, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya

11/14-17 36th International Microprocesses and Nanotechnology Conference (MNC 2023) (JR Hotel Clement, Tokushima)

16P-1: Poster Session I (14:00-16:00, Nov. 16), Room P (Eminence Hall) (2F)
BioMEMS, Lab on a Chip, and Nanobiotechnology

• 16P-1-87
  Developing a MEMS reservoir-computer for real-time epileptic seizure detection
  Amit Banerjee, Shuto Kawaguchi, Claude Meffan, Jun Hirotani, Toshiyuki Tsuchiya, Kyoto Univ., Japan

17B-2:Nano-devices IV (11:00-12:00, Nov. 17), Room B (Rose Room) (2F)

• 17B-2-1 11:00
  Developing Effective Si Nanoresonator Devices for Ultrasensitive Gas Sensing
  Wei Yu, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya, Kyoto Univ., Japan

Jan. 9-13, 2022 The 35th International Conference on Micro Electro Mechanical Systems (MEMS 2022) (Tokyo, JAPAN, Hybrid)

Virtual Poster Session I Monday, 10 January 22:00 – 23:30
118-b OBSERVATION OF PULL-IN BY CASIMIR FORCE IN MEMS-CONTROLLED NANOGAP FABRICATED BY SILICON CLEAVAGE
Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee, and Toshiyuki Tsuchiya
Kyoto University, JAPAN

Virtual Poster Session II Tuesday, 11 January 05:00 – 06:30
209-b MEMS RESERVOIR COMPUTING USING FREQUENCY MODULATED ACCELEROMETER
Takahirio Mizumoto, Yoshikazu Hirai, Amit Banerjee, and Toshiyuki Tsuchiya
Kyoto University, JAPAN

Session XIV – Microfluidic Devices, Thursday, 13 January 13:30 – 14:30
13:45 FIELD EFFECT TRANSISTOR-LIKE CONTROL OF CAPILLARIC FLOW USING OFF VALVES
Claude Meffan, Julian Menges, Daniel Mak, Fabian Dolamore, Conan Fee, Renwick Dobson, and Volker Nock
University of Canterbury, NEW ZEALAND

Feb. 28-Mar. 4 The 33rd International Symposium on Space Technology and Science (ISTS 2022) (Oita, Online)

[B-7] Electrospray Thrusters / Advanced Micro Thrusters, Wed. Mar 2, 2022 4:00 PM – 5:00 PM
4:00 PM – 4:20 PM
[2022-b-28] Design and fabrication of ionic liquid electrospray thruster with two-stage electrodes
*Akane Nishimura1, Yoshinori Takao2, Toshiyuki Tsuchiya1 (1. Kyoto University, 2. Yokohama National University)

May 8-13 2022 MRS Spring Meeting (Honolulu, HI)

Symposium MF01 – Cutting-Edge Plasma Processes Contributing to Sustainable Development Goals
5:00 PM, May 10 – MF01.07.01
Fluid Leak Detector for Cyclo-Olefin Polymer Microchannels Using Low-Temperature Bonding by Water Vapor Plasma
Masaaki Tsukamoto^1,2, Hirokazu Terai¹, Madoka Tsumaya¹, Shigeru Kurosawa¹, Osamu Tsuji¹, Masashi Satou², Yoshiyuki Inoue², Keiko Kawano², Tomoaki Matsushima², Toshiyuki Tsuchiya²
Samco Inc.¹, Kyoto University²

May 29-June 1 Asia-Pacific Conference of Transducers and Micro-Nano Technology 2022 (APCOT 2022)

May 30, 9:15 -10:45, Session1

[Plenary] Toshiyuki Tsuchiya
MEMS Reservoir Computing -Sensors Become More Intelligent-

June 29-30 International Conference and Exhibition on New Actuator Systems and Applications (Actuator 2022)

Thursday, June 30 09:00 – 12:40, B4 Actuator Control and Electronics

S. Xie, R. Liu, S. Okayama, T. Tsuchiya, M. Wong and X. Wang, “A Planar Single-Actuator Bi-Stable Mechanical/Electrical Switch," ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications, 2022, B4-5

August 28-31 2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022) (Nagoya, Japan)

Mon. Aug 29, 2022 2:00PM-3:15PM Room C Micro/Nano Mechanical Systems 3
[C1-3-04] Characterization of gap-distance dependency on field emission at nanogap between silicon cleavage surfaces by numerical calculations
*Yuki Akura¹, Masaki Shimofuri¹, Amit Banerjee¹, Jun Hirotani^1,2, Toshiyuki Tsuchiya¹ (1. Kyoto Univ., 2. JST PRESTO)

[C1-3-05] Fabrication and Dynamic Characterization of Ultrathin Si NEMS Resonators
*WEI YU¹, Amit Banerjee¹, Jun Hirotani¹, Toshiyuki Tsuchiya¹ (1. Kyoto University)

Tue. Aug 30, 2022 11:00 AM – 12:30 PM Room A Machine Learning and Intelligent Mechanical Systems 1
[A2-2-03] A non-linear SAW resonator as a reservoir computing node
*Claude Meffan¹, Amit Banerjee¹, Jun Hirotani¹, Toshiyuki Tsuchiya¹ (1. Kyoto University)

Tue. Aug 30, 2022 11:00AM-12:15PM Room C Micro/Nano Mechanical Systems 5
[C2-2-04] Alternating a-C:H Coating Effect on Torsional Strength of Silicon Beam for Micromirrors
*Yuanlin Xia¹, Amit Banerjee¹, Jun Hirotani¹, Toshiyuki Tsuchiya¹ (1. Kyoto University)

Nov. 8-11 35th International Microprocesses and Nanotechnology Conference (MNC 2022) (JR Hotel Clement, Tokushima)

Thursday, November 10, 13:30-14:50 10B-3: CNTs

14:30 10B-3-4: Highly temperature-tolerant p-type carbon nanotube transistor doped with 1,4,5,8,9,11-
hexaazatriphenylenehexacarbonitrile
Yuki Matsunaga¹, Jun Hirotani^2,3, Haruka Omachi¹, 1 Nagoya Univ., 2 Kyoto Univ. and 3 JST-PREST, Japan

Thursday, November 10, 9:30-11:30, Poster Session 1: Nanocarbons & 2D Materials

10P-1-2: Exfoliation of Al-residual Ti₃C₂T_x MXene by using tetramethylammonium bases and conductive film applications
Yuki Shibata¹, Emi Saita¹, Masaki Iwata¹, Yuki Matsunaga¹, Rie Suizu^1,2, Kunio Awaga¹, Jun Hirotani^2,3 and Haruka Omachi¹, 1 Nagoya Univ., 2 JST-PRESTO and 3 Kyoto Univ., Japan

Jan. 25-29 The 34th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021) (Online)

HIGHLY ACCURATE MEASUREMENT OF TRANS-EPITHELIAL ELECTRICAL RESISTANCE IN ORGAN-ON-A-CHIP
Takashi Miyazaki¹, Jiandong Yang¹, Satoshi Imamura¹, Yoshikazu Hirai¹, Ken-ichiro Kamei¹, Toshiyuki Tsuchiya¹, and Osamu Tabata^1,2
1Kyoto University, ²Kyoto University of Advanced Science

June 20-25 The 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021) (Online)

B2-2D1 MULTILAYERED MICROFLUIDIC DEVICE FOR CONTROLLABLE FLOW PERFUSION OF GUT-LIVER ON A CHIP
Jiandong Yang¹, Satoshi Imamura¹, Yoshikazu Hirai¹, Ken-ichiro Kamei¹, Toshiyuki Tsuchiya¹, and Osamu Tabata^1,2
1Kyoto University, Kyoto, JAPAN and 2Kyoto University of Advanced Science, Kyoto, JAPAN

B5-5D3 GRAVITY AND FILM STRESS ANALYSIS FOR MEMS DEFORMABLE MIRROR WITH ELECTROSTATIC PISTON ARRAY
Toshiyuki Tsuchiya¹, Toshiki Ema¹, Yoshikazu Hirai¹, Christopher Welham² and Hideyuki Maekoba²
1 Kyoto University, Kyoto, JAPAN, 2 Coventor, A Lam Research Company

B5-507a HIGH DURABILITY LATCH-LOCK BI-STABLE SWITCH ON Y-SHAPED CANTILEVER
Zili Tang¹, Qi Tao², Zehua Lan³, Zong Liu¹, Toshiyuki Tsuchiya⁴, Xiaohong Wang³, and Man Wong¹
1 Hong Kong University of Science and Technology, HONG KONG, 2 China Academy of Engineering Physics, Beijing, CHINA, 3 Tsing Hua University, Beijing, CHINA, 4 Kyoto University, Kyoto, JAPAN

B2-2A6 A PLANAR SINGLE-ACTUATOR BI-STABLE SWITCH BASED ON HOOKLESS MECHANISM
Zehua Lan¹, Qi Tao², Zili Tang³, Toshiyuki Tsuchiya⁴, Man Wong³, and Xiaohong Wang¹
1Tsinghua University, CHINA, 2China Academy of Engineering Physics, CHINA,
3Hong Kong University of Science and Technology, CHINA, and 4Kyoto University, JAPAN

[Just-in Press Session]

B6-JI1A1 MICROFABRICATED ALKALI METAL VAPOR CELLS FILLED WITH AN ON-CHIP DISPENSING COMPONENT
Shun Kiyose¹, Yoshikazu Hirai¹, Osamu Tabata², and Toshiyuki Tsuchiya¹
1Kyoto University, JAPAN and 2Kyoto University of Advanced Science, JAPAN

[TUTORIAL] Short Course 1: KEY TECHNOLOGIES AVAILABLE IN NANOFABRICATION CENTERS WORLDWIDE

SC1-2T1 FABRICATION OF CYCLO-OLEFIN POLYMER-BASED MICROFLUIDIC DEVICE USING WATER VAPOR PLASMA ACTIVATED BONDING
Toshiyuki Tsuchiya
Kyoto University, JAPAN

Sept. 20-23 Micro and Nano Engineering Conference (Turin, Italy / Hybrid)

Session C1: MEMS/NEMS Technology
Tuesday, September 21 10:45-12:45 am CET

11:45am Wineglass mode MEMS gyroscopes with single crystal materials (INVITED)
Toshiyuki Tsuchiya (Kyoto University)

Oct. 26-29 34th International Microprocesses and Nanotechnology Conference (MNC 2021) (Online)

29C-3: Microsystem Technology and MEMS Session III
Friday, October 29 13:30-14:50

13:30 29C-3-1 SOI-MEMS device for fabrication and physical properties measurement of single-crystal silicon nanogap with (111) cleavage plane surfaces
Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee and Toshiyuki Tsuchiya, Kyoto Univ., Japan

Sept. 27-30 Virtual IEEE NEMS 2020 (Online)

IS8: Micro/Nano Engineering for Advanced Bio/Medical Systems Tuesday, September 29 11:20 -13:00 (日本時間9/30 0:20-2:00)

IS8.6 (Invited) Microfluidic platform fabricated by three-dimensional lithography enables drug test and disease modeling in vitro
Yoshikazu HIRAI, Kyoto Univ., Japan

Oct. 4-9 μTAS2020 (Online)

e – Cells, Organisms and Organs on a Chip -Organs on Chip
T3-353.e HEART-LIVER ON A CHIP INTEGRATED WITH A MICROELECTRODE ARRAY TO MONITOR EXTRACELLULAR FIELD POTENTIALS OF CARDIOMYOCYTES
Dongxiao Zhang¹, Yoshikazu Hirai¹, Ken-ichiro Kamei¹, Osamu Tabata^1,2, and Toshiyuki Tsuchiya^1
1Kyoto University, JAPAN and ²Kyoto University of Advanced Science, JAPAN

Nov. 9-12 MNC2020 (Online)

5-1: Microsystem Technology and MEMS I
2020-5-8 Microfabricated Vapor Cells with Monolithically Integrated Alkali Metal Dispensing Component
Shun Kiyose¹, Yoshikazu Hirai¹, Osamu Tabata^1,2, Toshiyuki Tsuchiya¹ (1 Kyoto Univ., 2 Kyoto Univ. of Advanced Sci.)

5-3: Microsystem Technology and MEMS III
2020-5-22 Tensile Strength of Single-Crystal Silicon Microstructure with Stepwise Bias-graded a-C:H Coating
Yuanlin Xia, Yoshikazu Hirai, Toshiyuki Tsuchiya (Kyoto Univ.)

2020-5-23 Ionic Liquid Electrospray Thrusters with Uniform Needle-Emitter Arrays for Precise ThrustControl
Fumiya Tachibana¹, Toshiyuki Tsuchiya² and Yoshinori Takao¹ (1 Yokohama Natl. Univ., 2 Kyoto Univ.)

Nov. 26-28 5th International Conference on Emerging Electronics (IEEE-ICEE2020)

MEMS NEMS AND MICROFLUIDICS

[Invited lecture 5] Single-Crystal Lithium Niobate Piezoelectric Vibratory Disk Gyroscope
Toshiyuki Tsuchiya (Kyoto Univ., Japan)

Nov. 27 – Dec.4 2020 Virtual MRS Spring/Fall Meeting & Exhibit

S.SM01.02: Organ on a Chip

S.SM01.02.02 In Vitro Modeling of Non-Alcoholic Fatty Liver Disease by Integrated Gut-Liver on a Chip Jiandong Yang¹,Yoshikazu Hirai¹,Ken-ichiro Kamei¹,Marika Trumm^2,1,Toshiyuki Tsuchiya¹,Osamu Tabata¹
Kyoto University¹,Heidelberg University²