Paper published! – Sensors and Actuators A:Physical
A paper on research on improving the torsional strength of single-crystal silicon resonators by coat ...
Synchronization of MEMS mirror array
MEMS mirrors are optical devices that scan reflected light by torsional vibration of support beams o ...
Reliability of Single-Crystal Silicon Micromirrors
The purpose of this research is to realize high fracture strength and long fatigue life micromirrors ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensing and media devices. MEMS mirror ...
Reliability comparison of Si-based and SOI-based micro mirror resonator
Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is p ...
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system i ...