mirror

MEMS mirrors are optical devices that scan reflected light by torsional vibration of support beams on both sides of a ...

The purpose of this research is to realize high fracture strength and long fatigue life micromirrors with low cost. W ...

MEMS torsional mirror resonator is a key component for sensing and media devices.  MEMS mirror can be fabricated ...

Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is possible to provid ...

Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system is composed of a d ...