Synchronization of MEMS mirror array

MEMS mirrors are optical devices that scan reflected light by torsional vibration of support beams on both sides of a ...
Reliability of Single-Crystal Silicon Micromirrors

The purpose of this research is to realize high fracture strength and long fatigue life micromirrors with low cost. W ...
Reliability of MEMS Mirror

MEMS torsional mirror resonator is a key component for sensing and media devices. MEMS mirror can be fabricated ...
Reliability comparison of Si-based and SOI-based micro mirror resonator

Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is possible to provid ...
Electrostatic-driven deformable mirror device

Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system is composed of a d ...