Thumbnail of post image 029
A paper on research on improving the torsional strength of single-crystal silicon resonators by coat ...

Thumbnail of post image 135
MEMS mirrors are optical devices that scan reflected light by torsional vibration of support beams o ...

Thumbnail of post image 163
The purpose of this research is to realize high fracture strength and long fatigue life micromirrors ...

Thumbnail of post image 073
MEMS torsional mirror resonator is a key component for sensing and media devices.  MEMS mirror ...

Thumbnail of post image 050
Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is p ...

Thumbnail of post image 192
Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system i ...