Thumbnail of post image 077

The purpose of this research is to realize high fracture strength and long fatigue life micromirrors with low cost. W ...

Thumbnail of post image 002

MEMS torsional mirror resonator is a key component for sensing and media devices.  MEMS mirror can be fabricated ...

Thumbnail of post image 133

Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is possible to provid ...