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A paper on research on improving the torsional strength of single-crystal silicon resonators by coat ...

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The purpose of this research is to realize high fracture strength and long fatigue life micromirrors ...

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MEMS torsional mirror resonator is a key component for sensing and media devices.  MEMS mirror ...

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Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is p ...