Reliability of Single-Crystal Silicon Micromirrors
The purpose of this research is to realize high fracture strength and long fatigue life micromirrors with low cost. W ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensing and media devices. MEMS mirror can be fabricated ...
Reliability comparison of Si-based and SOI-based micro mirror resonator
Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is possible to provid ...