Reliability of Micro/Nano Machine
Mechanical Reliability Evaluation in Microsystem and MEMS
MEMS is being used in potable and mobile devices. The mechanical reliability, especially durability against shock and vibration, is a critical issue. We have been working on the mechanical reliability of MEMS devices and materials in microsystem.
Mechianical property evaluation of micromaterials
- Thin film tensile testing using electrostatic force grip
- Parallel tensile testing of micro specimens integrated with piezoresistive strain gauge
- Long-term reliability evaluation of MEMS using resonant vibration
- Fatigue test of MEMS miromirror using torsional vibration
Tensile strength and fatigue properties of thin film material
- Tensile strength of single-crystal and polycrystalline silicon thin film
- Lifetime modeling of single crystal silicon
- Strengthen of single crystal silicon microstructures using DLC coating
- Tensile strength of dielectric thin film (silicon dioxide and silicon nitride)
- Tensile strength of metal thin film (aluminum, nickel, titanium, etc.)
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