Nanogap device for thermal generation
Vacuum nanogaps are expected as small-sized, high-efficiency ...
Microchannel integrated MEMS device
Siで構成されるMEMSアクチュエータと，構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い，常温での異 ...
Properties of nanogap with single crystal silicon cleavage planes
Thermionic generation generates electricity by collecting th ...
Tensile Testing for Carbon Nanotube using Electrostatic MEMS
We are developing the method for tensile test of Carbon nano ...
Thermal properties evaluation of SOI-MEMS based nanogap with cleavage plane for thermionic generation
Thermionic generation generates electricity by collecting th ...
Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration gyros, it is ne ...
Reliability of Single-Crystal Silicon Micromirrors
The purpose of this research is to realize high fracture str ...
Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, sma ...
SAW Devices for Reservoir Computing
We are developing SAW (Surface acoustic wave) devices which ...
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...
Reliability comparison of Si-based and SOI-based micro mirror resonator
Comparing with the mature SOI-based micro mirror resonator, ...
Resonant mirror scanner using SiNW
Torsion mirror is a scanning device that scans a laser ...