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Miniaturization and reduced power consumption of atomic-base ...
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Siで構成されるMEMSアクチュエータと,構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い,常温での異 ...
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A geometrical compensation design method in (100) single cry ...
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We have developed Ionic liquids electrospray thruster (ILEST ...
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We investigated the source of acceleration sensitivity in fa ...
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熱ストレスの小さいMEMS真空封止技術を実現することを目的として,ナノスケール厚で積層させたAl/Ni膜の合金化反応熱を ...
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As the demand for machine learning and data analysis increas ...
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単結晶ニオブ酸リチウムを用いた圧電ディスク型振動ジャイロを提案した.
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There are two types of fabrication processes for MEMS torsio ...
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through-hole dry etching with Ni electroplated as a mask.
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  Silicon nanowire has excellent mechanical and electri ...