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Epilepsy is a chronic neurological disorder of the central n ...
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Development of a new vacuum sealing technology for MEMS reso ...
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Siで構成されるMEMSアクチュエータと,構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い,常温での異 ...
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Recently, physical reservoir computing (PRC) has attracted a ...
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A geometrical compensation design method in (100) single cry ...
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A mode-matched single-crystal lithium niobate disk gyroscope ...
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MEMS gyroscopes for measuring rate or angle of rotation can ...
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MEMS torsional micro mirror is a scanning device that scans ...
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Silicon nanowire has excellent mechanical and electrical pro ...
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 Torsion mirror is a scanning device that scans a laser ...
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We are developing thruster to be mounted on nanosatellite. E ...
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Miniaturization and reduced power consumption of atomic-base ...