Vacuum encapsulation of MEMS using self-propagating heat reaction of Al/Ni multilayer film
Development of a new vacuum sealing technology for MEMS reso ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning device that scans ...
Single-Crystal LN Piezoelectrical DRG Control System
A mode-matched single-crystal lithium niobate disk gyroscope ...
Equivalent Circuit Analysis for Electrostatic Vibrating Gyro with Self-contained Comb Transducer Component Model
We aim to design electrostatic vibrating gyroscopes by using ...
Ionic liquids electrospray thruster
We have developed Ionic liquids electrospray thruster (ILEST ...
Reliability comparison of Si-based and SOI-based micro mirror resonator
Comparing with the mature SOI-based micro mirror resonator, ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...
Reliability of Single-Crystal Silicon Micromirrors
The purpose of this research is to realize high fracture str ...
Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) film is one of the ...
Mode Localization and Reservoir Computing of MEMS Resonator Array
Recently, physical reservoir computing (PRC) has attracted a ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...