Mode-matched (100) silicon ring gyroscope
Recently, IoT society have demanded small-size and low-cost ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
MEMS gyroscopes for measuring rate or angle of rotation can ...
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...
Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
A geometrical compensation design method in (100) single cry ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...
Diamond nanoresonators for sensing and information processing
Nanoresonators are capable of ultrasensitive sensing and eff ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Nanogap device for thermionic generation
Devices and an external mechanism capable of nanogap formati ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered poten ...
Tensile behaviors of micron-scaled silicon coated with sub-micro meter thick PECVD DLC film
DLC (Diamond Like Carbon) film is one of the promising coati ...
Training MEMS devices for forecasting epileptic-seizures
Epilepsy is a chronic neurological disorder of the central n ...
Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used as an efficient ...