MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of ey ...
Electrical conduction property measurement of fracture-fabricated silicon nanogap
半導体微細加工技術を用いて作製した単結晶シリコンMEMSデバイスの梁構造に(111)面でへき開破壊を用いて数μm角の均一 ...
Synchronization of MEMS mirror array
MEMS mirrors are optical devices that scan reflected light b ...
Reliability of Single-Crystal Silicon Micromirrors
The purpose of this research is to realize high fracture str ...
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning device that scans ...
Training MEMS devices for forecasting epileptic-seizures
Epilepsy is a chronic neurological disorder of the central n ...
Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si ...
Tensile behaviors of micron-scaled silicon coated with sub-micro meter thick PECVD DLC film
DLC (Diamond Like Carbon) film is one of the promising coati ...
MEMS Reservoir Computing using Frequency Modulated Accelerometer
For miniaturization and Intelligence of MEMS sensors, we ar ...
Mode Localization and Reservoir Computing of MEMS Resonator Array
Recently, physical reservoir computing (PRC) has attracted a ...
MEMS Based SCS Cleavage Nanogap for Thermionic Generation
Thermionic generation generates electricity by collecting th ...
Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope
単結晶ニオブ酸リチウムを用いた圧電ディスク型振動ジャイロを提案した.