Properties of nanogap with single crystal silicon cleavage planes
Thermionic generation generates electricity by collecting th ...
Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating envi ...
Microfluidic device for separation of DNA origami complexes
Microfluidic device by using dielectrophoresis(DEP) is propo ...
Electrostatic MEMS for tensile-testing of nanomaterials
In this research, we focus on tensile testing of these mater ...
Local Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
Evaluating local stress in the microstructure is in high dem ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is us ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensi ...
TEER measurement microfluidic device
Organ on a Chip is a microfluidic device to culture human ce ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
MEMS gyroscopes for measuring rate or angle of rotation can ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計，作製し高い負荷周波数での引張疲労試験の実現を目指します．
Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been attracting atten ...
Electrostatic deformable mirror with moving substrate
Inspection light of funduscopy is warped by distortion of ey ...