MEMS Deformable Mirror Actuated By Electrostatic Piston Array

Inspection light of funduscopy is warped by distortion of eyeball. So deformable mirrors (DMs) to correct light instantly and accurately are widely utilized. We suggested a new DM, which generate large displacement. In this study, I establish it’s fabrication process, and improve design with mathematics analysis model for shape of DM.

[Applications]

  • 　Wavefront adaptive element in the funduscopy
  • 　Astronomical observation

[Publications]

  • Large-displacement electrostatic deformable mirror with movable bottom electrodes
    The 2014 International Conference on Optical MEMS and Nanophotonics (OMN 2014), Glasgow, Scotland (17-21 Aug. 2014), pp.119-120.
  • A. Uno, V. K. Singh, Y. Hirai, T. Tsuchiya, and O. Tabata, “Mathematical modeling and analysis of MEMS electrostatic-driven deformable mirror using movable bottom electrodes“, 2015 Institute of Electrical Engineers of Japan Micromachine/Sensor Division Symposium, Fukuoka, Japan, July 2015

2016年4月1日Actuators,Research