Q-factor of Si nanoresonator
Nanoresonator is a mechanical beam with nano-scale thickness ...
Resonant mirror scanner using SiNW
Torsion mirror is a scanning device that scans a laser ...
A sub-micron-gap SOI capacitive accelerometer array utilizing size effect
MEMS capacitive accelerometers have been widely used for con ...
Design and Analysis of Capacitive Vibrating Gyro using Electrical Equivalent Circuit
In this research, we aim to design the electrostatic gyro se ...
Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si ...
MEMS fabricated nanogap electrodes
We have developed a microelectromechanical system (MEMS) to ...
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects t ...
Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on nanosatellite. E ...
Vacuum encapsulation of MEMS using self-propagating heat reaction of Al/Ni multilayer film
Development of a new vacuum sealing technology for MEMS reso ...
TEER measurement microfluidic device
Organ on a Chip is a microfluidic device to culture human ce ...
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirro ...
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of retinal observation is warped by d ...