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Recently, IoT society have demanded small-size and low-cost sensors. MEMS vibrating ring gyroscopes have attracted at ...

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Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensitive sensors of ma ...

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A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) has bee ...

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せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計,作製し高い負荷周波数での引張疲労試験の実現を目指します.

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Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is possible to provid ...

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A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) with no ...

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Devices and an external mechanism capable of nanogap formation, measurement of gap distance and current measurement i ...

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Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property is affected by t ...