Mode-matched (100) silicon ring gyroscope
Recently, IoT society have demanded small-size and low-cost sensors. MEMS vibrating ring gyroscopes have attracted at ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensitive sensors of ma ...
Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) has bee ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計，作製し高い負荷周波数での引張疲労試験の実現を目指します．
Reliability comparison of Si-based and SOI-based micro mirror resonator
Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is possible to provid ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) with no ...
Nanogap device for thermionic generation
Devices and an external mechanism capable of nanogap formation, measurement of gap distance and current measurement i ...
Tensile testing of silicon at high temperature
Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property is affected by t ...