Thumbnail of post image 168
A paper on research on improving the torsional strength of single-crystal silicon resonators by coat ...

Thumbnail of post image 134
Recently, IoT society have demanded small-size and low-cost sensors. MEMS vibrating ring gyroscopes ...

Thumbnail of post image 027
Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensit ...

Thumbnail of post image 106
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...

Thumbnail of post image 162
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計,作製し高い負荷周波数での引張疲労試験の実現を目指します.

Thumbnail of post image 081
Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is p ...

Thumbnail of post image 058
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...

Thumbnail of post image 055
Devices and an external mechanism capable of nanogap formation, measurement of gap distance and curr ...