Theoretical Analysis of (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs
For small-size, low-cost and high-performance gyroscopes, wine-glass mode vibratory gyroscopes using ...
PhD Thesis Defense (Wei Yu)
PhD thesis defense by Mr. Wei Yu is going to be held at 10am, August 5th, 2024.
Paper published! – Sensors and Actuators A:Physical
A paper on research on improving the torsional strength of single-crystal silicon resonators by coat ...
Mode-matched (100) silicon ring gyroscope
Recently, IoT society have demanded small-size and low-cost sensors. MEMS vibrating ring gyroscopes ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensit ...
Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計，作製し高い負荷周波数での引張疲労試験の実現を目指します．
Reliability comparison of Si-based and SOI-based micro mirror resonator
Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is p ...