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A paper on research on improving the torsional strength of single-crystal silicon resonators by coat ...

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Recently, IoT society have demanded small-size and low-cost sensors. MEMS vibrating ring gyroscopes ...

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Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensit ...

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A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...

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せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計,作製し高い負荷周波数での引張疲労試験の実現を目指します.

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Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is p ...

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A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...

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Devices and an external mechanism capable of nanogap formation, measurement of gap distance and curr ...