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せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計,作製し高い負荷周波数での引張疲労試験の実現を目指します.

Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is possible to provid ...

A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) with no ...

Devices and an external mechanism capable of nanogap formation, measurement of gap distance and current measurement i ...