Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of retinal observation is warped by d ...
Flexible 3ω sensor
Thermal properties of fluids are needed when designing or ev ...
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...
Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been attracting atten ...
Q-factor of Si nanoresonator
Nanoresonator is a mechanical beam with nano-scale thickness ...
Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on nanosatellite. E ...
Coupled MEMS resonators for reservoir computing
Among hardware implementation methods of neuromorphic ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations cause ...
Training MEMS devices for forecasting epileptic-seizures
Epilepsy is a chronic neurological disorder of the central n ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered poten ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices have emerged as prom ...
(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction o ...