Sensor and actuator

Design, fabrication, measurement and analysis of various sensors (accelerometer and vibrating gyroscope) and actuators (optical component) are conducted. Electrostatic transducers are our expertise.

Inertial sensors

  • Single-mass three-axis capacitive accelerometer using vertical combs
  • Capacitive accelerometer array
  • (100) single crystal silicon electrostatic ring gyroscope
  • Single crystal lithium niobate piezoelectric disk gyroscope

Optical components

  • Electrostatic deformable mirror with piston electrode
  • Optical chopper using silicon-on-glass substrate
  • Torsional mirror array