Design, fabrication, measurement and analysis of various sensors (accelerometer and vibrating gyroscope) and actuators (optical component) are conducted. Electrostatic transducers are our expertise.
- Single-mass three-axis capacitive accelerometer using vertical combs
- Capacitive accelerometer array
- (100) single crystal silicon electrostatic ring gyroscope
- Single crystal lithium niobate piezoelectric disk gyroscope
- Electrostatic deformable mirror with piston electrode
- Optical chopper using silicon-on-glass substrate
- Torsional mirror array