Double stage electrode type Ionic liquids electrospray thruster
through-hole dry etching with Ni electroplate ...
Microfluidic device for separation of DNA origami complexes
Microfluidic device by using dielectrophoresi ...
Nanogap device for thermionic generation
Devices and an external mechanism capable of ...
Nanogap device for thermal generation
Vacuum nanogaps are expected as small-sized, ...
Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-m ...
Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
A geometrical compensation design method in ( ...
Thermal properties evaluation of SOI-MEMS based nanogap with cleavage plane for thermionic generation
Thermionic generation generates electricity b ...
MEMS fabricated nanogap electrodes
We have developed a microelectromechanical sy ...
Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on n ...
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-m ...
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning dev ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
MEMS gyroscopes for measuring rate or angle o ...
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices w ...
Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy
Vacuum nanogap electrodes are attracting atte ...