Al/Ni多層膜の自己伝播発熱反応を用いたMEMS振動型デバイスの真空封止
熱ストレスの小さいMEMS真空封止技術を実現することを目的として，ナノスケール厚で積層させたAl/Ni膜の合金化反応熱を ...
MEMS Reservoir Computing with accelerometer
Reservoir computing(RC) is a machine learning approach havin ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
MEMS gyroscopes for measuring rate or angle of rotation can ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...
MEMS fabricated nanogap electrodes
We have developed a microelectromechanical system (MEMS) to ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices have emerged as prom ...
Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on nanosatellite. E ...
Q-factor of Si nanoresonator
Nanoresonator is a mechanical beam with nano-scale thickness ...
Electrical equivalent circuit of electrostatic transducer
Electrostatic MEMS devices which are constructed from mechan ...
Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used as an efficient ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of ey ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...