Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on nanosatellite. Electrospray thruster gains thrust by exhausting ions, which […]
Fabrication
Sacrificial Microchannel Sealing by Glass-Frit Reflow for Micromachined Alkali Gas-Filled Cell
Microfabricated vapor cells containing alkali metal and buffer gas are in use for atomic-based instruments like atomic c […]
Lithography of composite material
Composite material consisted of base material and fillers is new material for micro device represented by MEMS. The conc […]
Process Parameter Optimizer
Grayscale lithography has been attracting huge attention recent years as a solution to 3D microstructuring for MEMS appl […]
Mechanical Properties Evaluation of Epoxy-based Chemically-Amplified Negative Resist
As one of attractive microstructure required for advanced polymer-based microfluidics, our objective is to develop th […]
Sacrificial Microchannel Sealing by Glass-Frit Reflow for Micromachined Alkali Gas-Filled Cell
We proposed a novel and simple packaging technique to enhance the atmosphere controllability of the microfabricated alka […]
Sacrificial Microchannel Sealing by Glass-Frit Reflow for Micromachined Alkali Gas-Filled Cell
A novel sealing technique using sacrificial microchannels was proposed for atmosphere control in a micromachined alkali […]
Particle Gap Control in Self Assembly of Gold Nanoparticle
Localized Surface Plasmon Resonance (LSPR) is focused on for new devices, such as plasmon waveguides and molecular senso […]
Fabrication technology of 3D microstructure using thick photoresist
In this study, we proposed a novel 3D (three-dimensional) UV lithography apparatus for thick-film resist and a UV lithog […]
Application of 3D lithography
Packaging to form a cavity with controlled ambient is an essential technology for sensitive structures like freely movab […]
Encapsulation techlogogy for MEMS
The importance of MEMS packaging technique to form a cavity with controlled ambient by various gases which is required f […]
Template assisted self assembilng for gold nanoparticles
Gold nano particles and gold nano rodｓ show a special character to the localized surface plasmon resonance (LSPR). We ai […]
