Thermal properties evaluation of SOI-MEMS based nanogap with cleavage plane for thermionic generation
【応用先】 Thermionic generation generates electricity by collecting thermionic electrons emitted from the high temperature e […]
Nanogap
Nanogap device for thermal generation
Vacuum nanogaps are expected as small-sized, high-efficiency thermoelectric devices due to their high thermal insulation […]
MEMS fabricated nanogap electrodes
We have developed a microelectromechanical system (MEMS) to fabricate large area nanogap electrodes. A thermal actuator […]
Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy
Vacuum nanogap electrodes are attracting attention because they can dramatically improve the thermal power generation ef […]
MEMS fabricated conformal electrodes for thermotunneling applications
We developed a microelectromechanical system (MEMS) to fabricate nanogap electrodes of uniform gap-size (~ 100 nm) acros […]
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed for controlled fracture of a silicon micro-beam, a promising m […]
Electrical conduction property measurement of fracture-fabricated silicon nanogap
半導体微細加工技術を用いて作製した単結晶シリコンMEMSデバイスの梁構造に(111)面でへき開破壊を用いて数μm角の均一でかつ原子レベルで平滑なナノギャップ構造を作製する技術を確立，電気伝導特性を測定してナノギャップ間の電子放出を確認した． […]
MEMS fabricated conformal electrodes for thermotunneling cooling
A microelectromechanical system (MEMS) is being developed for controlled fracture of a silicon micro-beam, a promising m […]
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize high efficient thermoelectric generators. To evaluate elect […]
