Application of 3D lithography

Packaging to form a cavity with controlled ambient is an essential technology for sensitive structures like freely movable MEMS. In this research, we manufacture glass-frit microchannels for gas-filled sealed cavity. The microchannels are manufactured by using sacrificial layer which was patterned by UV lithography and are utilized for not only bonding and sealing materials but also functional structure as a feedthrough to evacuate a cavity in the substrate and infuse a gas into the cavity. Furthermore, by using moving-mask UV lithography, the cross sections of glass-frit microchannels can be controlled.
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