Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsional mirror device. One is the process using SOI wafer, and t […]
Actuators
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning device that scans a laser beam by reflecting it. The device is used for variou […]
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mirror devices can scan […]
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used in adaptive optics for retinal observation with higher resolution. it is necessary to control […]
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of retinal observation is warped by distortion of eyeball. So deformable mirrors (DMs) to correct wave […]
Resonant mirror scanner using SiNW
Torsion mirror is a scanning device that scans a laser beam by reflecting it. The device is used for various applicatio […]
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations caused by eye distortion. We propose and develop new type of DM, […]
Electromagnetic-driven deformable mirror device
Adaptive optics is a significant device that corrects the wavefront aberrations. This system is composed of deformable m […]
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of eyeball. So deformable mirrors (DMs) to correct light instantl […]
Electromagnetic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system is composed of a defo […]
Lithography of composite material
Composite material consisted of base material and fillers is new material for micro device represented by MEMS. The conc […]
Electrostatic deformable mirror with moving substrate
Inspection light of funduscopy is warped by distortion of eyeballs and atmospheric vibration. So it’s required to correc […]
