Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsional mirror device. One is the process using SOI wafer, and t […]
Micromaterial
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro structure, we have deve […]
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal to its many desirable mech […]
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro structure, we have deve […]
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mirror devices can scan […]
Tensile behaviors of micron-scaled silicon coated with sub-micro meter thick PECVD DLC film
DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal to its many desirable mech […]
Parallel tensile testing device with integrated shear strain gauge for SC-Si
In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro structure, we have deve […]
Resonant mirror scanner using SiNW
Torsion mirror is a scanning device that scans a laser beam by reflecting it. The device is used for various applicatio […]
Tensile testing of silicon covered with DLC film
DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal to its many desirable pro […]
parallel tensile testing of silicon with integrated strain gauge
In order to shorten a testing time for evaluation of tensile-mode fatigue properties of single crystal silicon, we have […]
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is necessary for the reliability of MEMS in harsh environments. Si […]
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices need mechanical deformations for their operations, evaluation […]
