Localized Surface Plasmon Resonance (LSPR) is focused on for new devices, such as plasmon waveguides and molecular sensors by using SERS. To realize plasmon waveguides with nanoparticles, it is necessary to control gaps between nanoparticles with 10 nm order. To realize more sensitive molecular sensors, it is necessary to fabricate nanoparticle chains. We are approaching them by using TASA method.