Mechanical Properties Evaluation of Epoxy-based Chemically-Amplified Negative Resist


As one of attractive microstructure required for advanced polymer-based microfluidics, our objective is to develop the filtration membrane made of epoxy-based negative photoresist, and its detail investigations on such as mechanical and permeability characteristics. In our previous study, we demonstrated that the permeability characteristics mainly depends on the cross-liked ratio of epoxy polymer. We therefore characterized mechanical properties (e.g., elastic modulus and hardness) dependence on the cross-linked ratio by the nanoindentatior.
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