Sacrificial Microchannel Sealing by Glass-Frit Reflow for Micromachined Alkali Gas-Filled Cell

Microfabricated vapor cells containing alkali metal and buffer gas are in use for atomic-based instruments like atomic clocks, atomic magnetometers, or other quantum sensors. We study on an effective vapor cell fabrication at the wafer-level utilizing a novel Cs-source, that are applicable to MEMS-based atomic clocks. This method enables in-situ thermal decomposition of CsN3 with high efficiency at the waferlevel.  The fabricated Cs-filled cells via a combination of the Cs-source and low-temperature bonding process achieved the good atomic clock frequency stability


  • CSAC, Atomic magnetic sensor, Gyro sensor


-Yoshikazu Hirai, et al. “Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for  Microfabricated Vapor Cells.” International Frequency Control Symposium (IFCS), 2018. IEEE,  2018.

-Katsuo Nakamura, et al. “Microfabrication of Alkali Vapor Cells with Lower the Outgassing and Temperature Utilizing Silicon 3D Structure.” Micro Electro Mechanical Systems (MEMS), 2019 32nd International Conference on. IEEE, 2019.