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★RecentNews

  • Our work was one of the top downloaded in recent publication history!
  • 2020 MRS Spring Meeting
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  • IEEE MEMS 2020

★RecentUpdate

  • Chamber for Diffracted X-ray Tracking
  • Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
  • Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
  • Molecular Trace Analysis with Gold Nanoparticle Dimers Formed by DNA Origami Technique
  • Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope

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Nano/Micro System Engineering Laboratory
Department of Micro Engineering, Kyoto University
Kyoto Daigaku-Katsura C3, Nishikyo-ku, Kyoto 615-8540, JAPAN
TEL：075-383-3693　/ FAX:075-383-3738 / E-mail
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