Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) has been p […]
Sensors
Sacrificial Microchannel Sealing by Glass-Frit Reflow for Micromachined Alkali Gas-Filled Cell
Microfabricated vapor cells containing alkali metal and buffer gas are in use for atomic-based instruments like atomic c […]
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
MEMS gyroscopes for measuring rate or angle of rotation can be used to provide heading information for inertial navigati […]
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer and automobile applications. Our purpose is to improve sens […]
A sub-micron-gap SOI capacitive accelerometer array utilizing size effect
MEMS capacitive accelerometers have been widely used for consumer and automobile applications. Our purpose is high sensi […]
Matrix sensitivity calibration of 3-axis accelerometer
Matrix sensitivity calibration has been proposed to evaluate sensitivities of inertial sensors as vector values. In orde […]
Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fabricated tuning fork gyroscope (TFG) by using in-plane and o […]
Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, small size, and easily integrated with ASIC. Therefore, MEMS vi […]
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricated with microfabrication method, and contain mechanical and e […]
Sacrificial Microchannel Sealing by Glass-Frit Reflow for Micromachined Alkali Gas-Filled Cell
We proposed a novel and simple packaging technique to enhance the atmosphere controllability of the microfabricated alka […]
Equivalent Circuit Analysis for Electrostatic Vibrating Gyro with Self-contained Comb Transducer Component Model
We aim to design electrostatic vibrating gyroscopes by using an electrical equivalent circuit analysis. Electrostatic ME […]
Design and Analysis of Capacitive Vibrating Gyro using Electrical Equivalent Circuit
In this research, we aim to design the electrostatic gyro sensor including controlled voltages as design parameters by u […]
