We proposed a novel and simple packaging technique to enhance the atmosphere controllability of the microfabricated alkali vapor cell used for CSAMs (Chip Scale Atomic Magnetometers), in which sacrificial microchannels at the bonded interface are utilized as gas feedthrough for evacuation and filling, subsequently sealed by glass-frit reflow. By far, we designed cross-sectional shape of microchannel by reflow simulation and size of microchannels based on the flow conductance model. Sealing of the microchannels by glass-frit reflow were successfully demonstrated. The required leak was verified through a leak test. By applying the proposed method we have fabricated potassium vapor cell with helium buffer gas.
[Publications]
[Journal Paper]
- 辻本和也，平井義和，菅野公二，土屋智由，田畑修, “チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術“, 電気学会センサ・マイクロマシン部門誌, Vol. 131-E, No. 7, (2011) (Accepted).
[International Conference]
- K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, and O. Tabata, “Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer”, MEMS2011, Cancun, Mexico, Jan. 23-27 2011, pp. 368-371.
- K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, and O. Tabata, “Sacrificial Microchannel Sealing by Glass-Frit Reflow for Micromachined Alkali Gas-Filled Cell”, APCOT2010, Perth, Australia (July, 2010), pp.211.