Design and Analysis of Capacitive Vibrating Gyro using Electrical Equivalent Circuit
In this research, we aim to design the electrostatic gyro sensor including controlled voltages as design parameters by u […]
Daily Archives: Tuesday April 20th, 2010
Sacrificial Microchannel Sealing by Glass-Frit Reflow for Micromachined Alkali Gas-Filled Cell
A novel sealing technique using sacrificial microchannels was proposed for atmosphere control in a micromachined alkali […]
Local Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
Evaluating local stress in the microstructure is in high demand for designing and manufacturing MEMS and assessing the r […]
Modeling of Self-assembly in Microscale
Self-assembly process has been attracting much attention as a promising technique to integrate multiple functional sm […]
Particle Gap Control in Self Assembly of Gold Nanoparticle
Localized Surface Plasmon Resonance (LSPR) is focused on for new devices, such as plasmon waveguides and molecular senso […]
Sequential Self-assembly of DNA Origami using Microfluidic Device
DNA origami which is the sheet of 100nm scale manufactured with DNA is expected its application in biology as the macrom […]
Mixing Speed-Controlled Gold Nanoparticle Synthesis using Pulsed Mixing Microfluidic System
Gold nano particles have the property called localized surface plasmon resonance (LSPR) and they are expected to apply t […]
SERS using arrayed metallic nanoparticles
Metal nanoparticles have unique properties such as Localized Surface Plasmon Resonance (LSPR). It is known that LSPR can […]
Optimization of Membrane Structure in Capacitive ultrasonic transducer
Capacitive micromachined ultrasonic transducers (cMUTs) have been attracting attentions as an alternative to traditional […]
Plate-Shaped Nano Particle Separation using Electrophoresis
Gold nanoparticles have a feature to enhance electrical field, and it will be applied to high-sensitive sensing by surfa […]
Chip self-assembling using DNA hybridization
Self assembly attracts attentions as the most promising assembly technology to mount multi type of components parallel. […]
Fabrication technology of 3D microstructure using thick photoresist
In this study, we proposed a novel 3D (three-dimensional) UV lithography apparatus for thick-film resist and a UV lithog […]
