Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsional mirror device. One is the process using SOI wafer, and t […]
Daily Archives: Monday June 10th, 2019
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro structure, we have deve […]
Molecular Trace Analysis with Gold Nanoparticle Dimers Formed by DNA Origami Technique
We propose a method for forming gold nanoparticle (AuNP) dimers for surface enhanced Raman spectroscopy (SERS) by DNA or […]
Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) has been p […]
Thermal properties evaluation of SOI-MEMS based nanogap with cleavage plane for thermionic generation
【応用先】 Thermionic generation generates electricity by collecting thermionic electrons emitted from the high temperature e […]
Body on a Chip device for drug permeability evaluation
Recently, Body on a Chip (BoC), has attracted great attentions as a reliable drug screening platform. It reestablished c […]
Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on nanosatellite. Electrospray thruster gains thrust by exhausting ions, which […]
Sacrificial Microchannel Sealing by Glass-Frit Reflow for Micromachined Alkali Gas-Filled Cell
Microfabricated vapor cells containing alkali metal and buffer gas are in use for atomic-based instruments like atomic c […]
Control of Gold Nano Dimer Structure with DNA Origami Molds
DNA origami is a method to create nanostructures by DNA. We use DNA origami structures as molds in order to produce gold […]
Microfluidic device for separation of DNA origami nanoparticles using dielectrophoresis
[Applications] DNA origami is a key technology in the field of structural DNA nanotechnology to fold DNA into a variety […]
Nanogap device for thermal generation
Vacuum nanogaps are expected as small-sized, high-efficiency thermoelectric devices due to their high thermal insulation […]
MEMS fabricated nanogap electrodes
We have developed a microelectromechanical system (MEMS) to fabricate large area nanogap electrodes. A thermal actuator […]
