Tri axis capacitive accelerometer
Performance requirements for seismometer are high resolution, low noise level, durability and so on. We propose a differ […]
Performance requirements for seismometer are high resolution, low noise level, durability and so on. We propose a differ […]
Capacitive micromachined ultrasonic transducers (cMUTs) have been attracting attentions as an alternative to traditional […]
Packaging to form a cavity with controlled ambient is an essential technology for sensitive structures like freely movab […]
The importance of MEMS packaging technique to form a cavity with controlled ambient by various gases which is required f […]
Integration of multiple functional small components with MEMS is an essential technology to extend MEMS functionality […]
Gold nano particles and gold nano rods show a special character to the localized surface plasmon resonance (LSPR). We ai […]
Self-assembly has the possibility to implement a minute part effectively of the micro,nano meter scale, so it attracts a […]
Electrostatic MEMS devices which are constructed from mechanical structure, electrical circuit and electromechanical tra […]
Gold nanoparticles have unique property. So, it is expected that they are applied to many scientific fields. Optical pro […]