Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirro ...
Microfabricated alkali metal vapor cells
Miniaturization and reduced power consumption of atomic-base ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue tes ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...
Q-factor of Si nanoresonator
Nanoresonator is a mechanical beam with nano-scale thickness ...
Characterization of ssDNA modified CNTs
Carbon nanotube (CNT) is expected to be applied to elements ...
Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy
Vacuum nanogap electrodes are attracting attention because t ...
Electrostatic deformable mirror with moving substrate
Inspection light of funduscopy is warped by distortion of ey ...
Thermal field emission between nanogap
Thermionic conversion is a power generation method collects ...
Tensile testing of silicon covered with DLC film
DLC (Diamond Like Carbon) film is one of the promising ...
Equivalent Circuit Analysis for Electrostatic Vibrating Gyro with Self-contained Comb Transducer Component Model
We aim to design electrostatic vibrating gyroscopes by using ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is us ...