Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of retinal observation is warped by d ...
Thermal properties evaluation of SOI-MEMS based nanogap with cleavage plane for thermionic generation
Thermionic generation generates electricity by collecting th ...
Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used as an efficient ...
Tensile testing of silicon covered with DLC film
DLC (Diamond Like Carbon) film is one of the promising ...
Tensile behaviors of micron-scaled silicon coated with sub-micro meter thick PECVD DLC film
DLC (Diamond Like Carbon) film is one of the promising coati ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計，作製し高い負荷周波数での引張疲労試験の実現を目指します．
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricate ...
Resonant mirror scanner using SiNW
Torsion mirror is a scanning device that scans a laser ...
Electrochemical properties of MXene/CNT thin film
MXene, which is a two-dimensional layered nanomaterial, exhi ...
Characterization of ssDNA modified CNTs
Carbon nanotube (CNT) is expected to be applied to elements ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...