Electrostatic tuning for gyroscope

To improve the performance of MEMS vibration gyros, it is necessary to make the stiffness of the resonator isotropic. Electrostatic tuning is a method of adjusting the stiffness of the resonator by applying electrostatic force to realize isotropy. We analyzed the frequency response of a (100) single-crystal silicon vibrating ring gyroscope, and proposed the optimal electrostatic tuning in terms of sensitivity and bias stability.


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