Synchronized vibration of MEMS mirrors

MEMS torsional micromirror is an optical device that scans reflected light by torsional vibration of support beams on both sides of a mirror. A high-performance mirror is desired for application to spatial scanning systems such as endoscopes and lidars, but the performance is limited by mirror surface distortion and beam stress. In this research, to realize a high-performance spatial scanning system, we reduce the distortion and the stress by miniaturing the mirror and thinning the beam, compensate the reflection area by array arrangement of the mirrors, and synchronize the vibrations of the mirror array.

[Publication(s)]

–  Mikiya Oki, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya, Synchronous vibration of 1×2 torsional micromirror array,  The 49th International Coneference on Micro ＆ Nano Engineering (MNE 2023), Berlin, Germany (Sep. 25-28, 2023), pp. 781-782

–  Mikiya Oki, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya, Design of MEMS torsional mirror array for synchronous vibration, Proceedings of the 40th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Kumamoto, Japan (November 6-8, 2023), 8P2-PS-9