Microchannel integrated MEMS device
MEMS testing device, which is capable of evaluating mechanical, electrical property of micro-materials, can be applied to in situ evaluation of wider variety of materials by sensing / actuation in aqueous condition.
We are developing MEMS testing device integrating microfluidic channel in it. As its bonding process, we demonstrated water vapor plasma heterogeneous bonding of Si/COP(Cyclic Orefin Polymer)
【Application】 • Nano-material test, assembling material by liquid transportation • Mechanical evaluation of micro-material, like single cell