
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...

Properties of nanogap with single crystal silicon cleavage planes
Thermionic generation generates electricity by collecting th ...

Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single cry ...

Thermal field emission between nanogap
Thermionic conversion is a power generation method collects ...

Flexible 3ω sensor
Thermal properties of fluids are needed when designing or ev ...

Parallel tensile testing of silicon with integrated strain gauge
In order to shorten a testing time for evaluation of tensile ...

Nanogap device for thermal generation
Vacuum nanogaps are expected as small-sized, high-efficiency ...

Design and Analysis of Capacitive Vibrating Gyro using Electrical Equivalent Circuit
In this research, we aim to design the electrostatic gyro se ...

Synchronization of MEMS mirror array
MEMS mirrors are optical devices that scan reflected light b ...

Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of retinal observation is warped by d ...

Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirro ...