Temperature dependence of electron emission between cleavage planes for thermionic power generation
シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う
Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy
Vacuum nanogap electrodes are attracting attention because t ...
Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration gyros, it is ne ...
Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used as an efficient ...
Thermal field emission between nanogap
Thermionic conversion is a power generation method collects ...
Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on nanosatellite. E ...
Local Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
Evaluating local stress in the microstructure is in high dem ...
Development of Nanopatterning and Reactive Ion Etching of Diamond Film for NEMS Resonator Devices
Nanofabrication technologies have been evolving at an astoni ...
Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) film is one of the ...
Tensile strength evaluation of free-standing silicon nanowire integrated to MEMS
Silicon nanowire has excellent mechanical and electri ...
Tensile testing of silicon covered with DLC film
DLC (Diamond Like Carbon) film is one of the promising ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered poten ...