Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal to its many desirable mech […]
Daily Archives: Wednesday June 6th, 2018
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro structure, we have deve […]
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning device that scans a laser beam by reflecting it. The device is used for variou […]
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
MEMS gyroscopes for measuring rate or angle of rotation can be used to provide heading information for inertial navigati […]
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mirror devices can scan […]
Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy
Vacuum nanogap electrodes are attracting attention because they can dramatically improve the thermal power generation ef […]
Control of Gold Nano Dimer Structure with DNA Origami Molds
DNA origami is a method to create nanostructures by DNA. We use DNA origami structures as molds in order to produce gold […]
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used in adaptive optics for retinal observation with higher resolution. it is necessary to control […]
MEMS fabricated conformal electrodes for thermotunneling applications
We developed a microelectromechanical system (MEMS) to fabricate nanogap electrodes of uniform gap-size (~ 100 nm) acros […]
