Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating environment. In order to improve the reliability of such product […]
Daily Archives: Wednesday October 1st, 2014
Micro fluidic system for drug testing
The side effect of drugs over our body is one of the problems in the drug discovery process. We propose the drug testing […]
Matrix sensitivity calibration of 3-axis accelerometer
Matrix sensitivity calibration has been proposed to evaluate sensitivities of inertial sensors as vector values. In orde […]
DNA origami purification on a chip
After synthesized, DO(DNA Origami) solution contains tons of single-stranded DNA, mis-folded DO as well as well-folded o […]
Selective fixation of DNA origami on Si substrate
DNA origami is expected to be a versatile building block to arrange nanomaterials such as metal nanoparticles, carbon na […]
Tensile testing of silicon at high temperature
Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property is affected by temp […]
Reliability evaluation of silicon microstructure
Silicon is a widely-used material for MEMS devices structure. It is a brittle material, so its mechanical reliability is […]
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system is composed of a defo […]
Microfluidic system for medical diagnosis
In medical field, microfluidic system have many merits for medical diagnosis system. We constructed microfluidic cell so […]
MEMS Tensile testing of Integrated Si Nanowire
Siナノワイヤは機械的・電気的特性に優れ，これをナノスケール構造体要素として用いた幅広い応用デバイスが注目されています．これらのデバイスの実現と信頼性の向上のため，MEMS構造体への一括集積化技術とその機械特性評価をおこなっています． 【応 […]
Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fabricated tuning fork gyroscope (TFG) by using in-plane and o […]
