Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement

MEMS (Micro Electro Mechanical System) devices are fabricated with microfabrication method, and contain mechanical and electric behavior. Therefore, it is important to analyze an interaction between the two behavior. As a result, equivalent circuit method, which enables to analyze whole system at a time, is expected to become a key to that. However its models and analysis methods in previous way are inapplicable to nonlinear region. This research is intended to apply equivalent circuit method to nonlinear region. I developed two nonlinear models: one shows hard spring effect comes from clamped-clamped beam and another shows soft spring effect comes from comb shaped electrode.

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