In this research, we aim to design the electrostatic gyro sensor including controlled voltages as design parameters by using electrical equivalent circuit analysis. Electrostatic MEMS devices are constructed from mechanical structure, electrical circuit and electromechanical transducers. And an equivalent circuit model represents whole systems as circuits and analyze them together. So it is expected to be useful for designing MEMS. In our past research, we built the equivalent circuit model of the electrostatic comb transducer which is independent of external parameters like spring constants and controlled voltages. In the future, it is expected to design MEMS by using the model. We focus on the ability of the model to estimate an effect of controlled voltage and advance our own designing.
- Component modelling of 2DOF comb transducer for equivalent circuit using built-in displacement detection
Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata,
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010), Perth, Australia (July, 2010)