Tri axis capacitive accelerometer
Performance requirements for seismometer are high resolution, low noise level, durability and so on. We propose a differ […]
Performance requirements for seismometer are high resolution, low noise level, durability and so on. We propose a differ […]
Capacitive micromachined ultrasonic transducers (cMUTs) have been attracting attentions as an alternative to traditional […]
Electrostatic MEMS devices which are constructed from mechanical structure, electrical circuit and electromechanical tra […]