Matrix sensitivity calibration has been proposed to evaluate sensitivities of inertial sensors as vector values. In order to apply this method to MEMS accelerometers, the technique to measure multiple sensors at once is required. We evaluated the effects of rotational motion of a shaker and angular alignment error of sensors.
- High precision measurement (IMU, Geophysical exploration, Seismograph)
- Design guideline of MEMS accelerometer considering cross sensitivities
- Nakano et. al, IEEE MEMS 2013, pp.645-648.