Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si ...
Reliability of Single-Crystal Silicon Micromirrors
The purpose of this research is to realize high fracture str ...
Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, sma ...
Parallel tensile testing of silicon with integrated strain gauge
In order to shorten a testing time for evaluation of tensile ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices have emerged as prom ...
Microchannel integrated MEMS device
Siで構成されるMEMSアクチュエータと，構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い，常温での異 ...
Synchronization of MEMS mirror array
MEMS mirrors are optical devices that scan reflected light b ...
Tensile Testing for Carbon Nanotube using Electrostatic MEMS
We are developing the method for tensile test of Carbon nano ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations cause ...
Synchronized vibration of MEMS mirrors
MEMS torsional micromirror is an optical device that scans r ...
Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating envi ...
Dynamic Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
The aim of this research is to analyze local and instantaneo ...