Microfabricated alkali metal vapor cells
Miniaturization and reduced power consumption of atomic-base ...
Piezoelectric Vibrating Gyroscope using Cylindrical Lithium Niobate Resonator
In recent years, automatic driving has been attracting atten ...
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects t ...
Tensile test of silicon nanowire by using electrostatic MEMS device
Silicon nanowire has excellent mechanical and electrical pro ...
Characterization of ssDNA modified CNTs
Carbon nanotube (CNT) is expected to be applied to elements ...
Electrical conduction property measurement of fracture-fabricated silicon nanogap
半導体微細加工技術を用いて作製した単結晶シリコンMEMSデバイスの梁構造に(111)面でへき開破壊を用いて数μm角の均一 ...
Tensile Testing for Carbon Nanotube using Electrostatic MEMS
We are developing the method for tensile test of Carbon nano ...
Parallel tensile testing device with integrated shear strain gauge for SC-Si
In order to shorten testing time on tensile-mode fatigue tes ...
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...
Single-Crystal LN Piezoelectrical DRG Control System
A mode-matched single-crystal lithium niobate disk gyroscope ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations cause ...
Temperature dependence of electron emission between cleavage planes for thermionic power generation
シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う