High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Synchronized vibration of MEMS mirrors
MEMS torsional micromirror is an optical device that scans r ...
Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fa ...
Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration gyros, it is ne ...
Electrochemical properties of MXene/CNT thin film
MXene, which is a two-dimensional layered nanomaterial, exhi ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered poten ...
Vacuum encapsulation of MEMS using self-propagating heat reaction of Al/Ni multilayer film
Development of a new vacuum sealing technology for MEMS reso ...
Temperature dependence of electron emission between cleavage planes for thermionic power generation
シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う
Parallel tensile testing of silicon with integrated strain gauge
In order to shorten a testing time for evaluation of tensile ...
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of retinal observation is warped by d ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is us ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...