Local Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
Evaluating local stress in the microstructure is in high dem ...
Electrochemical properties of MXene/CNT thin film
MXene, which is a two-dimensional layered nanomaterial, exhi ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is us ...
ILEST with two-stage electrodes
We develop the ionic liquid electrospray thruster (ILEST) to ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensi ...
Ionic liquid electrospray thruster for nanosatellite
Recently, launches of satellites weigh less than 10 kg, call ...
Physical Reservoir Computing Using Nonlinear Heat Conduction
As the demand for machine learning and data analysis increas ...
Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been attracting atten ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices n ...
Mode Localization and Reservoir Computing of MEMS Resonator Array
Recently, physical reservoir computing (PRC) has attracted a ...
Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration gyros, it is ne ...
SAW Devices for Reservoir Computing
We are developing SAW (Surface acoustic wave) devices which ...




