A mode-matched single-crystal lithium niobate disk gyroscope has been proposed and fabricated to realize a tactical grade MEMS gyroscope. The 155°-Y cut wafer was chosen to keep the elastic compliance in uniform for any in-plane directions. And a sixteen-electrode pattern was designed to compensate the anisotropic piezoelectric property of LN wafer. Rate output was successfully read, and force-to-rebalance control system was used to enlarge the scale factor to 3.3 µV/°/s.
- Piezoelectrical disk resonator
- K. Obitani, T. Tsuchiya, K. Araya, M. Yachi, 45th International Conference onMicro & Nano Engineering (MNE2019), Rhodes, Greece (September 23-26, 2019)
- K. Obitani, T. Tsuchiya, K. Araya, M. Yachi, The 33rd International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), Vancouver, Canada (January 18-22, 2020)
- Kazutaka Obitani, Kazutaka Araya, Masanori Yachi, Toshiyuki Tsuchiya, Piezoelectric Disk Gyroscope Fabricated with Single-Crystal Lithium Niobate
Journal of Microelectromechanical Systems, availavle online (2021). DOI: 10.1109/JMEMS.2021.3063101