Microfabricated alkali metal vapor cells

Miniaturization and reduced power consumption of atomic-based devices have been required. Furthermore, improvement in performance is the most important. In our laboratory, we proposed an innovative fabrication method for the alkali metal vapor cell, one of the important components. The fabrication of the cell with an on-chip alkali metal dispensing component allows to realize the miniaturization and the high performance of the cell.


  • Atomic clock
  • Atomic magnetic sensor
  • Inertial sensor


  • S. Kiyose et al., ‘Microfabricated alkali metal vapor cells filled with an on-chip dispensing component’, Jpn. J. of Appl. Phys., Vol. 60, SCCL01 (2021).
  • S. Kiyose et al., ‘Microfabricated vapor cells with monolithically integrated alkali metal dispensing component’, MNC2020.