Mode-matched (100) silicon ring gyroscope
Recently, IoT society have demanded small-size and low-cost ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is nec ...
Reliability evaluation of silicon microstructure
Silicon is a widely-used material for MEMS devices structure ...
Chamber for Diffracted X-ray Tracking
Diffracted X-ray Tracking (DXT) method is real-time imaging ...
Assembly of single SWCNT modified by ssDNA using dielectrophoresis
To clarify the characteristic of SWCNT including its variabi ...
(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction o ...
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize ...
Tensile behaviors of micron-scaled silicon structure fully coated with sub-micro meter thick DLC film deposited using PECVD
DLC (Diamond Like Carbon) film is one of the promising coati ...
SAW Devices for Reservoir Computing
We are developing SAW (Surface acoustic wave) devices which ...
Thermal field emission between nanogap
Thermionic conversion is a power generation method collects ...
Local Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
Evaluating local stress in the microstructure is in high dem ...
Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been attracting atten ...