Microfabricated alkali metal vapor cells
Miniaturization and reduced power consumption ...
MEMS Reservoir Computing using Frequency Modulated Accelerometer
For miniaturization and Intelligence of MEMS ...
Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been a ...
Ionic liquids electrospray thruster
We have developed Ionic liquids electrospray ...
(100) silicon ring gyroscope
In recent IoT society, miniaturization and pr ...
TEER measurement microfluidic device
Organ on a Chip is a microfluidic device to c ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are c ...
Reliability of Single-Crystal Silicon Micromirrors
The purpose of this research is to realize hi ...
Coupled MEMS resonators for reservoir computing
Among hardware implementation methods of ...
Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used ...
Thermal field emission between nanogap
Thermionic conversion is a power generation m ...
Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) fil ...
Data processing using MEMS
Reservoir computing is a kind of machine lear ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key comp ...
Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in ( ...
MEMS Based SCS Cleavage Nanogap for Thermionic Generation
Thermionic generation generates electricity b ...