Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) fil ...
Data processing using MEMS
Reservoir computing is a kind of machine lear ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key comp ...
Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in ( ...
MEMS Based SCS Cleavage Nanogap for Thermionic Generation
Thermionic generation generates electricity b ...
Single-Crystal LN Piezoelectrical DRG Control System
A mode-matched single-crystal lithium niobate ...
Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration ...
ILEST with two-stage electrodes
We develop the ionic liquid electrospray thru ...
MEMS Reservoir Computing with accelerometer
Reservoir computing(RC) is a machine learning ...
Al/Ni多層膜の自己伝播発熱反応を用いたMEMS振動型デバイスの真空封止
熱ストレスの小さいMEMS真空封止技術を実現することを目的として，ナノスケール厚で積層させ ...
Microfabricated alkali metal vapor cells
Miniaturization and reduced power consumption ...
MEMS Nanogap Device
In this research, a single crystal silicon be ...