Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration gyros, it is ne ...
Reliability comparison of Si-based and SOI-based micro mirror resonator
Comparing with the mature SOI-based micro mirror resonator, ...
Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, sma ...
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer ...
Frequency-domain thermoreflectance
Although required in a wide range of fields including the se ...
Tensile test of silicon nanowire by using electrostatic MEMS device
Silicon nanowire has excellent mechanical and electrical pro ...
Flexible 3ω sensor
Thermal properties of fluids are needed when designing or ev ...
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricate ...
Electrostatic MEMS for tensile-testing of nanomaterials
In this research, we focus on tensile testing of these mater ...
Ionic liquid electrospray thruster for nanosatellite
Recently, launches of satellites weigh less than 10 kg, call ...
Diamond nanoresonators for sensing and information processing
Nanoresonators are capable of ultrasensitive sensing and eff ...
Coupled MEMS resonators for reservoir computing
Among hardware implementation methods of neuromorphic ...