Frequency-domain thermoreflectance

Although required in a wide range of fields including the semiconductor industry, the understanding of heat transfer phenomena at the nano- and micro-scale is inadequate due to the difficulty of thermal measurement. We have been working to improve the accuracy of the frequency-domain thermoreflectance, a non-contact, high precision thermophysical property measurement method using lasers that can be applied to nano and micro scale samples.

Conference Presentation

Yuki Akura, Amit Banerjee, Toshiyuki Tsuchiya, and Jun Hirotani, “Highly sensitive thermophysical property measurement for anisotropic materials using frequency-domain thermoreflectance with transducer patterning”, The 64th Fullerenes-Nanotubes-Graphene General Symposium, March 1-3, 2023, Nagoya, Japan.

Patent Application

Sample, Apparatus for Measuring Thermophysical Properties, and Method for Measuring Thermophysical Properties, Patent Application 2023-017520, Kyoto University, Jun Hirotani, Yuki Anzukura. Filed February 8, 2023.