10×10 capacitive accelerometer array

Capacitive accelerometers have been widely used for consumer and automobile applications. Our purpose is to improve sensitivity. We propose an arrayed structure to improve sensitivity without increasing volume. The size effect is investigated by design, fabrication, and sensitivity measurement of 10×10 accelerometers whose unit size is 1/10 of conventional accelerometer.

[Applications]

• 　Seismic measurement
• 　Health monitoring of buildings and bridges by natural frequency analysis

[Publication]

• “A sub-micron-gap SOI capacitive accelerometer array utilizing size effect", The 18th International Conference on Solid-State Sensors Actuators and Microsystems, Anchorage, 2015