Flexible 3ω sensor

Thermal properties of fluids are needed when designing or evaluating thermal devices. In this research, we focus on 3ω method which is one of measurement methods for determining thermal properties. Conventional 3ω sensors have some drawbacks, for example heat loss to the substrate decreases sensitivity. We fabricate a flexible 3ω sensor which substrate is a thin parylene film to increase sensitivity due to low thermal conductivity of parylene.