ILEST with two-stage electrodes
We develop the ionic liquid electrospray thruster (ILEST) to ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is us ...
Parallel tensile testing device with integrated shear strain gauge for SC-Si
In order to shorten testing time on tensile-mode fatigue tes ...
Tensile strength evaluation of free-standing silicon nanowire integrated to MEMS
Silicon nanowire has excellent mechanical and electri ...
Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
A geometrical compensation design method in (100) single cry ...
Thermionic generation with Nanogap
Thermionic generation is a method of power generation in whi ...
Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, sma ...
Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on nanosatellite. E ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of ey ...
Tensile behaviors of micron-scaled silicon coated with sub-micro meter thick PECVD DLC film
DLC (Diamond Like Carbon) film is one of the promising coati ...
Measurement of temperature difference between cleavage plane nanogap using micro Raman spectroscopy
Vacuum nanogap electrodes are attracting attention because t ...
Reliability evaluation of silicon microstructure
Silicon is a widely-used material for MEMS devices structure ...